1/11/2012	12:03:28 AM	Helium valve closed
1/11/2012	12:03:28 AM	H2 valve closed
1/11/2012	12:03:28 AM	BCl3 valve closed
1/11/2012	12:03:28 AM	PH3 valve closed
1/11/2012	12:03:28 AM	SiCl4 pre valve closed
1/11/2012	12:03:28 AM	SiCl4 post valve closed
1/11/2012	12:03:28 AM	Main Vac valve closed
1/11/2012	12:03:28 AM	Bypass valve closed
1/11/2012	12:03:28 AM	Bubbler valve closed
1/11/2012	12:03:28 AM	Helium MFC set to  0.000000
1/11/2012	12:03:28 AM	H2 MFC set to  0.000000
1/11/2012	12:03:28 AM	BCl3 MFC set to  0.000000
1/11/2012	12:03:28 AM	PH3 MFC set to  0.000000
1/11/2012	12:03:28 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:03:28 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:03:28 AM	Tube furnace set to 0
1/11/2012	12:03:29 AM	Run finished at 12:03 AM
1/11/2012	12:30:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2012	12:30:52 AM	Recipe started at 12:30 AM
1/11/2012	12:30:52 AM	Helium valve closed
1/11/2012	12:30:52 AM	H2 valve closed
1/11/2012	12:30:52 AM	BCl3 valve closed
1/11/2012	12:30:52 AM	PH3 valve closed
1/11/2012	12:30:52 AM	SiCl4 pre valve closed
1/11/2012	12:30:52 AM	SiCl4 post valve closed
1/11/2012	12:30:52 AM	Main Vac valve closed
1/11/2012	12:30:52 AM	Bypass valve closed
1/11/2012	12:30:52 AM	Bubbler valve closed
1/11/2012	12:30:52 AM	Helium MFC set to  0.000000
1/11/2012	12:30:52 AM	H2 MFC set to  0.000000
1/11/2012	12:30:52 AM	BCl3 MFC set to  0.000000
1/11/2012	12:30:52 AM	PH3 MFC set to  0.000000
1/11/2012	12:30:52 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:30:52 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:30:52 AM	Tube furnace set to 0
1/11/2012	12:30:55 AM	H2 valve closed
1/11/2012	12:30:55 AM	BCl3 valve closed
1/11/2012	12:30:55 AM	PH3 valve closed
1/11/2012	12:30:55 AM	SiCl4 pre valve closed
1/11/2012	12:30:55 AM	SiCl4 post valve closed
1/11/2012	12:30:55 AM	Main Vac valve closed
1/11/2012	12:30:55 AM	Bypass valve closed
1/11/2012	12:30:55 AM	Bubbler valve closed
1/11/2012	12:30:55 AM	Helium valve opened
1/11/2012	12:30:55 AM	Helium MFC set to  500.000000
1/11/2012	12:30:55 AM	H2 MFC set to  0.000000
1/11/2012	12:30:55 AM	BCl3 MFC set to  0.000000
1/11/2012	12:30:55 AM	PH3 MFC set to  0.000000
1/11/2012	12:30:55 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:30:55 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:30:55 AM	Tube furnace set to 0
1/11/2012	12:31:01 AM	Helium valve closed
1/11/2012	12:31:01 AM	H2 valve closed
1/11/2012	12:31:01 AM	BCl3 valve closed
1/11/2012	12:31:01 AM	PH3 valve closed
1/11/2012	12:31:01 AM	SiCl4 pre valve closed
1/11/2012	12:31:01 AM	SiCl4 post valve closed
1/11/2012	12:31:01 AM	Main Vac valve closed
1/11/2012	12:31:01 AM	Bypass valve closed
1/11/2012	12:31:01 AM	Bubbler valve closed
1/11/2012	12:31:01 AM	Helium MFC set to  0.000000
1/11/2012	12:31:01 AM	H2 MFC set to  0.000000
1/11/2012	12:31:01 AM	BCl3 MFC set to  0.000000
1/11/2012	12:31:01 AM	PH3 MFC set to  0.000000
1/11/2012	12:31:01 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:31:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:31:02 AM	Tube furnace set to 0
1/11/2012	12:31:03 AM	Run finished at 12:31 AM
1/11/2012	12:31:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2012	12:40:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2012	12:40:17 AM	Recipe started at 12:40 AM
1/11/2012	12:40:17 AM	Helium valve closed
1/11/2012	12:40:17 AM	H2 valve closed
1/11/2012	12:40:17 AM	BCl3 valve closed
1/11/2012	12:40:17 AM	PH3 valve closed
1/11/2012	12:40:17 AM	SiCl4 pre valve closed
1/11/2012	12:40:17 AM	SiCl4 post valve closed
1/11/2012	12:40:17 AM	Main Vac valve closed
1/11/2012	12:40:17 AM	Bubbler valve closed
1/11/2012	12:40:17 AM	Bypass valve opened
1/11/2012	12:40:17 AM	Helium MFC set to  0.000000
1/11/2012	12:40:17 AM	H2 MFC set to  0.000000
1/11/2012	12:40:17 AM	BCl3 MFC set to  0.000000
1/11/2012	12:40:17 AM	PH3 MFC set to  0.000000
1/11/2012	12:40:17 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:40:17 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:40:17 AM	Tube furnace set to 0
1/11/2012	12:41:16 AM	Helium valve closed
1/11/2012	12:41:16 AM	H2 valve closed
1/11/2012	12:41:16 AM	BCl3 valve closed
1/11/2012	12:41:16 AM	PH3 valve closed
1/11/2012	12:41:16 AM	SiCl4 pre valve closed
1/11/2012	12:41:16 AM	SiCl4 post valve closed
1/11/2012	12:41:16 AM	Main Vac valve closed
1/11/2012	12:41:16 AM	Bubbler valve closed
1/11/2012	12:41:16 AM	Bypass valve opened
1/11/2012	12:41:16 AM	Helium MFC set to  0.000000
1/11/2012	12:41:16 AM	H2 MFC set to  0.000000
1/11/2012	12:41:16 AM	BCl3 MFC set to  0.000000
1/11/2012	12:41:16 AM	PH3 MFC set to  0.000000
1/11/2012	12:41:16 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:41:16 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:41:16 AM	Tube furnace set to 0
1/11/2012	12:42:16 AM	Helium valve closed
1/11/2012	12:42:16 AM	H2 valve closed
1/11/2012	12:42:16 AM	BCl3 valve closed
1/11/2012	12:42:16 AM	PH3 valve closed
1/11/2012	12:42:16 AM	SiCl4 pre valve closed
1/11/2012	12:42:16 AM	SiCl4 post valve closed
1/11/2012	12:42:16 AM	Bypass valve closed
1/11/2012	12:42:16 AM	Bubbler valve closed
1/11/2012	12:42:16 AM	Main Vac valve opened
1/11/2012	12:42:16 AM	Helium MFC set to  0.000000
1/11/2012	12:42:16 AM	H2 MFC set to  0.000000
1/11/2012	12:42:16 AM	BCl3 MFC set to  0.000000
1/11/2012	12:42:16 AM	PH3 MFC set to  0.000000
1/11/2012	12:42:16 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:42:16 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:42:17 AM	Tube furnace set to 0
1/11/2012	12:42:18 AM	Run finished at 12:42 AM
1/11/2012	12:42:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2012	12:47:36 AM	Main Vac valve closed
1/11/2012	12:47:43 AM	Main Vac valve opened
1/11/2012	12:47:56 AM	Recipe started at 12:47 AM
1/11/2012	12:47:56 AM	Helium valve closed
1/11/2012	12:47:56 AM	H2 valve closed
1/11/2012	12:47:56 AM	BCl3 valve closed
1/11/2012	12:47:56 AM	PH3 valve closed
1/11/2012	12:47:56 AM	SiCl4 pre valve closed
1/11/2012	12:47:56 AM	SiCl4 post valve closed
1/11/2012	12:47:56 AM	Bypass valve closed
1/11/2012	12:47:56 AM	Bubbler valve closed
1/11/2012	12:47:56 AM	Main Vac valve opened
1/11/2012	12:47:56 AM	Helium MFC set to  0.000000
1/11/2012	12:47:56 AM	H2 MFC set to  0.000000
1/11/2012	12:47:56 AM	BCl3 MFC set to  0.000000
1/11/2012	12:47:56 AM	PH3 MFC set to  0.000000
1/11/2012	12:47:56 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:47:56 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:47:56 AM	Tube furnace set to 0
1/11/2012	12:48:26 AM	H2 valve closed
1/11/2012	12:48:26 AM	BCl3 valve closed
1/11/2012	12:48:26 AM	PH3 valve closed
1/11/2012	12:48:26 AM	SiCl4 pre valve closed
1/11/2012	12:48:26 AM	SiCl4 post valve closed
1/11/2012	12:48:26 AM	Bypass valve closed
1/11/2012	12:48:26 AM	Bubbler valve closed
1/11/2012	12:48:26 AM	Helium valve opened
1/11/2012	12:48:26 AM	Main Vac valve opened
1/11/2012	12:48:26 AM	Helium MFC set to  20.000000
1/11/2012	12:48:26 AM	H2 MFC set to  0.000000
1/11/2012	12:48:26 AM	BCl3 MFC set to  0.000000
1/11/2012	12:48:26 AM	PH3 MFC set to  0.000000
1/11/2012	12:48:26 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:48:26 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:48:26 AM	Tube furnace set to 0
1/11/2012	12:48:56 AM	Helium valve closed
1/11/2012	12:48:56 AM	H2 valve closed
1/11/2012	12:48:56 AM	BCl3 valve closed
1/11/2012	12:48:56 AM	PH3 valve closed
1/11/2012	12:48:56 AM	SiCl4 pre valve closed
1/11/2012	12:48:56 AM	SiCl4 post valve closed
1/11/2012	12:48:56 AM	Bypass valve closed
1/11/2012	12:48:56 AM	Bubbler valve closed
1/11/2012	12:48:56 AM	Main Vac valve opened
1/11/2012	12:48:56 AM	Helium MFC set to  0.000000
1/11/2012	12:48:56 AM	H2 MFC set to  0.000000
1/11/2012	12:48:56 AM	BCl3 MFC set to  0.000000
1/11/2012	12:48:56 AM	PH3 MFC set to  0.000000
1/11/2012	12:48:56 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:48:56 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:48:56 AM	Tube furnace set to 0
1/11/2012	12:49:26 AM	H2 valve closed
1/11/2012	12:49:26 AM	BCl3 valve closed
1/11/2012	12:49:26 AM	PH3 valve closed
1/11/2012	12:49:26 AM	SiCl4 pre valve closed
1/11/2012	12:49:26 AM	SiCl4 post valve closed
1/11/2012	12:49:26 AM	Bypass valve closed
1/11/2012	12:49:26 AM	Bubbler valve closed
1/11/2012	12:49:26 AM	Helium valve opened
1/11/2012	12:49:26 AM	Main Vac valve opened
1/11/2012	12:49:26 AM	Helium MFC set to  20.000000
1/11/2012	12:49:26 AM	H2 MFC set to  0.000000
1/11/2012	12:49:26 AM	BCl3 MFC set to  0.000000
1/11/2012	12:49:26 AM	PH3 MFC set to  0.000000
1/11/2012	12:49:26 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:49:26 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:49:27 AM	Tube furnace set to 0
1/11/2012	12:49:57 AM	Helium valve closed
1/11/2012	12:49:57 AM	H2 valve closed
1/11/2012	12:49:57 AM	BCl3 valve closed
1/11/2012	12:49:57 AM	PH3 valve closed
1/11/2012	12:49:57 AM	SiCl4 pre valve closed
1/11/2012	12:49:57 AM	SiCl4 post valve closed
1/11/2012	12:49:57 AM	Bypass valve closed
1/11/2012	12:49:57 AM	Bubbler valve closed
1/11/2012	12:49:57 AM	Main Vac valve opened
1/11/2012	12:49:57 AM	Helium MFC set to  0.000000
1/11/2012	12:49:57 AM	H2 MFC set to  0.000000
1/11/2012	12:49:57 AM	BCl3 MFC set to  0.000000
1/11/2012	12:49:57 AM	PH3 MFC set to  0.000000
1/11/2012	12:49:57 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:49:57 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:49:57 AM	Tube furnace set to 0
1/11/2012	12:50:27 AM	H2 valve closed
1/11/2012	12:50:27 AM	BCl3 valve closed
1/11/2012	12:50:27 AM	PH3 valve closed
1/11/2012	12:50:27 AM	SiCl4 pre valve closed
1/11/2012	12:50:27 AM	SiCl4 post valve closed
1/11/2012	12:50:27 AM	Bypass valve closed
1/11/2012	12:50:27 AM	Bubbler valve closed
1/11/2012	12:50:27 AM	Helium valve opened
1/11/2012	12:50:27 AM	Main Vac valve opened
1/11/2012	12:50:27 AM	Helium MFC set to  20.000000
1/11/2012	12:50:27 AM	H2 MFC set to  0.000000
1/11/2012	12:50:27 AM	BCl3 MFC set to  0.000000
1/11/2012	12:50:27 AM	PH3 MFC set to  0.000000
1/11/2012	12:50:27 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:50:27 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:50:27 AM	Tube furnace set to 0
1/11/2012	12:50:57 AM	Helium valve closed
1/11/2012	12:50:57 AM	H2 valve closed
1/11/2012	12:50:57 AM	BCl3 valve closed
1/11/2012	12:50:57 AM	PH3 valve closed
1/11/2012	12:50:57 AM	SiCl4 pre valve closed
1/11/2012	12:50:57 AM	SiCl4 post valve closed
1/11/2012	12:50:57 AM	Bypass valve closed
1/11/2012	12:50:57 AM	Bubbler valve closed
1/11/2012	12:50:57 AM	Main Vac valve opened
1/11/2012	12:50:57 AM	Helium MFC set to  0.000000
1/11/2012	12:50:57 AM	H2 MFC set to  0.000000
1/11/2012	12:50:57 AM	BCl3 MFC set to  0.000000
1/11/2012	12:50:57 AM	PH3 MFC set to  0.000000
1/11/2012	12:50:57 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:50:57 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:50:57 AM	Tube furnace set to 0
1/11/2012	12:51:27 AM	H2 valve closed
1/11/2012	12:51:27 AM	BCl3 valve closed
1/11/2012	12:51:27 AM	PH3 valve closed
1/11/2012	12:51:27 AM	SiCl4 pre valve closed
1/11/2012	12:51:27 AM	SiCl4 post valve closed
1/11/2012	12:51:27 AM	Bypass valve closed
1/11/2012	12:51:27 AM	Bubbler valve closed
1/11/2012	12:51:27 AM	Helium valve opened
1/11/2012	12:51:27 AM	Main Vac valve opened
1/11/2012	12:51:27 AM	Helium MFC set to  20.000000
1/11/2012	12:51:27 AM	H2 MFC set to  0.000000
1/11/2012	12:51:27 AM	BCl3 MFC set to  0.000000
1/11/2012	12:51:27 AM	PH3 MFC set to  0.000000
1/11/2012	12:51:27 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:51:27 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:51:27 AM	Tube furnace set to 0
1/11/2012	12:51:57 AM	Helium valve closed
1/11/2012	12:51:57 AM	H2 valve closed
1/11/2012	12:51:57 AM	BCl3 valve closed
1/11/2012	12:51:57 AM	PH3 valve closed
1/11/2012	12:51:57 AM	SiCl4 pre valve closed
1/11/2012	12:51:57 AM	SiCl4 post valve closed
1/11/2012	12:51:57 AM	Bypass valve closed
1/11/2012	12:51:57 AM	Bubbler valve closed
1/11/2012	12:51:57 AM	Main Vac valve opened
1/11/2012	12:51:57 AM	Helium MFC set to  0.000000
1/11/2012	12:51:57 AM	H2 MFC set to  0.000000
1/11/2012	12:51:57 AM	BCl3 MFC set to  0.000000
1/11/2012	12:51:57 AM	PH3 MFC set to  0.000000
1/11/2012	12:51:57 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:51:57 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:51:58 AM	Tube furnace set to 0
1/11/2012	12:52:28 AM	H2 valve closed
1/11/2012	12:52:28 AM	BCl3 valve closed
1/11/2012	12:52:28 AM	PH3 valve closed
1/11/2012	12:52:28 AM	SiCl4 pre valve closed
1/11/2012	12:52:28 AM	SiCl4 post valve closed
1/11/2012	12:52:28 AM	Bypass valve closed
1/11/2012	12:52:28 AM	Bubbler valve closed
1/11/2012	12:52:28 AM	Helium valve opened
1/11/2012	12:52:28 AM	Main Vac valve opened
1/11/2012	12:52:28 AM	Helium MFC set to  20.000000
1/11/2012	12:52:28 AM	H2 MFC set to  0.000000
1/11/2012	12:52:28 AM	BCl3 MFC set to  0.000000
1/11/2012	12:52:28 AM	PH3 MFC set to  0.000000
1/11/2012	12:52:28 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:52:28 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:52:28 AM	Tube furnace set to 0
1/11/2012	12:52:58 AM	Helium valve closed
1/11/2012	12:52:58 AM	H2 valve closed
1/11/2012	12:52:58 AM	BCl3 valve closed
1/11/2012	12:52:58 AM	PH3 valve closed
1/11/2012	12:52:58 AM	SiCl4 pre valve closed
1/11/2012	12:52:58 AM	SiCl4 post valve closed
1/11/2012	12:52:58 AM	Bypass valve closed
1/11/2012	12:52:58 AM	Bubbler valve closed
1/11/2012	12:52:58 AM	Main Vac valve opened
1/11/2012	12:52:58 AM	Helium MFC set to  0.000000
1/11/2012	12:52:58 AM	H2 MFC set to  0.000000
1/11/2012	12:52:58 AM	BCl3 MFC set to  0.000000
1/11/2012	12:52:58 AM	PH3 MFC set to  0.000000
1/11/2012	12:52:58 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:52:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:52:58 AM	Tube furnace set to 0
1/11/2012	12:53:28 AM	H2 valve closed
1/11/2012	12:53:28 AM	BCl3 valve closed
1/11/2012	12:53:28 AM	PH3 valve closed
1/11/2012	12:53:28 AM	SiCl4 pre valve closed
1/11/2012	12:53:28 AM	SiCl4 post valve closed
1/11/2012	12:53:28 AM	Bypass valve closed
1/11/2012	12:53:28 AM	Bubbler valve closed
1/11/2012	12:53:28 AM	Helium valve opened
1/11/2012	12:53:28 AM	Main Vac valve opened
1/11/2012	12:53:28 AM	Helium MFC set to  20.000000
1/11/2012	12:53:28 AM	H2 MFC set to  0.000000
1/11/2012	12:53:28 AM	BCl3 MFC set to  0.000000
1/11/2012	12:53:28 AM	PH3 MFC set to  0.000000
1/11/2012	12:53:28 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:53:28 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:53:28 AM	Tube furnace set to 0
1/11/2012	12:53:58 AM	Helium valve closed
1/11/2012	12:53:58 AM	H2 valve closed
1/11/2012	12:53:58 AM	BCl3 valve closed
1/11/2012	12:53:58 AM	PH3 valve closed
1/11/2012	12:53:58 AM	SiCl4 pre valve closed
1/11/2012	12:53:58 AM	SiCl4 post valve closed
1/11/2012	12:53:58 AM	Bypass valve closed
1/11/2012	12:53:58 AM	Bubbler valve closed
1/11/2012	12:53:58 AM	Main Vac valve opened
1/11/2012	12:53:58 AM	Helium MFC set to  0.000000
1/11/2012	12:53:58 AM	H2 MFC set to  0.000000
1/11/2012	12:53:58 AM	BCl3 MFC set to  0.000000
1/11/2012	12:53:58 AM	PH3 MFC set to  0.000000
1/11/2012	12:53:58 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:53:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:53:58 AM	Tube furnace set to 0
1/11/2012	12:54:28 AM	H2 valve closed
1/11/2012	12:54:28 AM	BCl3 valve closed
1/11/2012	12:54:28 AM	PH3 valve closed
1/11/2012	12:54:28 AM	SiCl4 pre valve closed
1/11/2012	12:54:28 AM	SiCl4 post valve closed
1/11/2012	12:54:28 AM	Bypass valve closed
1/11/2012	12:54:28 AM	Bubbler valve closed
1/11/2012	12:54:28 AM	Helium valve opened
1/11/2012	12:54:28 AM	Main Vac valve opened
1/11/2012	12:54:28 AM	Helium MFC set to  20.000000
1/11/2012	12:54:28 AM	H2 MFC set to  0.000000
1/11/2012	12:54:29 AM	BCl3 MFC set to  0.000000
1/11/2012	12:54:29 AM	PH3 MFC set to  0.000000
1/11/2012	12:54:29 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:54:29 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:54:29 AM	Tube furnace set to 0
1/11/2012	12:54:59 AM	Helium valve closed
1/11/2012	12:54:59 AM	H2 valve closed
1/11/2012	12:54:59 AM	BCl3 valve closed
1/11/2012	12:54:59 AM	PH3 valve closed
1/11/2012	12:54:59 AM	SiCl4 pre valve closed
1/11/2012	12:54:59 AM	SiCl4 post valve closed
1/11/2012	12:54:59 AM	Bypass valve closed
1/11/2012	12:54:59 AM	Bubbler valve closed
1/11/2012	12:54:59 AM	Main Vac valve opened
1/11/2012	12:54:59 AM	Helium MFC set to  0.000000
1/11/2012	12:54:59 AM	H2 MFC set to  0.000000
1/11/2012	12:54:59 AM	BCl3 MFC set to  0.000000
1/11/2012	12:54:59 AM	PH3 MFC set to  0.000000
1/11/2012	12:54:59 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:54:59 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:54:59 AM	Tube furnace set to 0
1/11/2012	12:55:29 AM	H2 valve closed
1/11/2012	12:55:29 AM	BCl3 valve closed
1/11/2012	12:55:29 AM	PH3 valve closed
1/11/2012	12:55:29 AM	SiCl4 pre valve closed
1/11/2012	12:55:29 AM	SiCl4 post valve closed
1/11/2012	12:55:29 AM	Bypass valve closed
1/11/2012	12:55:29 AM	Bubbler valve closed
1/11/2012	12:55:29 AM	Helium valve opened
1/11/2012	12:55:29 AM	Main Vac valve opened
1/11/2012	12:55:29 AM	Helium MFC set to  20.000000
1/11/2012	12:55:29 AM	H2 MFC set to  0.000000
1/11/2012	12:55:29 AM	BCl3 MFC set to  0.000000
1/11/2012	12:55:29 AM	PH3 MFC set to  0.000000
1/11/2012	12:55:29 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:55:29 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:55:29 AM	Tube furnace set to 0
1/11/2012	12:55:59 AM	Helium valve closed
1/11/2012	12:55:59 AM	H2 valve closed
1/11/2012	12:55:59 AM	BCl3 valve closed
1/11/2012	12:55:59 AM	PH3 valve closed
1/11/2012	12:55:59 AM	SiCl4 pre valve closed
1/11/2012	12:55:59 AM	SiCl4 post valve closed
1/11/2012	12:55:59 AM	Bypass valve closed
1/11/2012	12:55:59 AM	Bubbler valve closed
1/11/2012	12:55:59 AM	Main Vac valve opened
1/11/2012	12:55:59 AM	Helium MFC set to  0.000000
1/11/2012	12:55:59 AM	H2 MFC set to  0.000000
1/11/2012	12:55:59 AM	BCl3 MFC set to  0.000000
1/11/2012	12:55:59 AM	PH3 MFC set to  0.000000
1/11/2012	12:55:59 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:55:59 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:55:59 AM	Tube furnace set to 0
1/11/2012	12:56:29 AM	H2 valve closed
1/11/2012	12:56:29 AM	BCl3 valve closed
1/11/2012	12:56:29 AM	PH3 valve closed
1/11/2012	12:56:29 AM	SiCl4 pre valve closed
1/11/2012	12:56:29 AM	SiCl4 post valve closed
1/11/2012	12:56:29 AM	Bypass valve closed
1/11/2012	12:56:29 AM	Bubbler valve closed
1/11/2012	12:56:29 AM	Helium valve opened
1/11/2012	12:56:29 AM	Main Vac valve opened
1/11/2012	12:56:29 AM	Helium MFC set to  20.000000
1/11/2012	12:56:29 AM	H2 MFC set to  0.000000
1/11/2012	12:56:29 AM	BCl3 MFC set to  0.000000
1/11/2012	12:56:29 AM	PH3 MFC set to  0.000000
1/11/2012	12:56:29 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:56:29 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:56:29 AM	Tube furnace set to 0
1/11/2012	12:56:59 AM	Helium valve closed
1/11/2012	12:56:59 AM	H2 valve closed
1/11/2012	12:57:00 AM	BCl3 valve closed
1/11/2012	12:57:00 AM	PH3 valve closed
1/11/2012	12:57:00 AM	SiCl4 pre valve closed
1/11/2012	12:57:00 AM	SiCl4 post valve closed
1/11/2012	12:57:00 AM	Bypass valve closed
1/11/2012	12:57:00 AM	Bubbler valve closed
1/11/2012	12:57:00 AM	Main Vac valve opened
1/11/2012	12:57:00 AM	Helium MFC set to  0.000000
1/11/2012	12:57:00 AM	H2 MFC set to  0.000000
1/11/2012	12:57:00 AM	BCl3 MFC set to  0.000000
1/11/2012	12:57:00 AM	PH3 MFC set to  0.000000
1/11/2012	12:57:00 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:57:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:57:00 AM	Tube furnace set to 200
1/11/2012	12:57:30 AM	H2 valve closed
1/11/2012	12:57:30 AM	BCl3 valve closed
1/11/2012	12:57:30 AM	PH3 valve closed
1/11/2012	12:57:30 AM	SiCl4 pre valve closed
1/11/2012	12:57:30 AM	SiCl4 post valve closed
1/11/2012	12:57:30 AM	Bypass valve closed
1/11/2012	12:57:30 AM	Bubbler valve closed
1/11/2012	12:57:30 AM	Helium valve opened
1/11/2012	12:57:30 AM	Main Vac valve opened
1/11/2012	12:57:30 AM	Helium MFC set to  20.000000
1/11/2012	12:57:30 AM	H2 MFC set to  0.000000
1/11/2012	12:57:30 AM	BCl3 MFC set to  0.000000
1/11/2012	12:57:30 AM	PH3 MFC set to  0.000000
1/11/2012	12:57:30 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:57:30 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:57:30 AM	Tube furnace set to 200
1/11/2012	12:58:00 AM	Helium valve closed
1/11/2012	12:58:00 AM	H2 valve closed
1/11/2012	12:58:00 AM	BCl3 valve closed
1/11/2012	12:58:00 AM	PH3 valve closed
1/11/2012	12:58:00 AM	SiCl4 pre valve closed
1/11/2012	12:58:00 AM	SiCl4 post valve closed
1/11/2012	12:58:00 AM	Bypass valve closed
1/11/2012	12:58:00 AM	Bubbler valve closed
1/11/2012	12:58:00 AM	Main Vac valve opened
1/11/2012	12:58:00 AM	Helium MFC set to  0.000000
1/11/2012	12:58:00 AM	H2 MFC set to  0.000000
1/11/2012	12:58:00 AM	BCl3 MFC set to  0.000000
1/11/2012	12:58:00 AM	PH3 MFC set to  0.000000
1/11/2012	12:58:00 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:58:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:58:00 AM	Tube furnace set to 200
1/11/2012	12:58:30 AM	H2 valve closed
1/11/2012	12:58:30 AM	BCl3 valve closed
1/11/2012	12:58:30 AM	PH3 valve closed
1/11/2012	12:58:30 AM	SiCl4 pre valve closed
1/11/2012	12:58:30 AM	SiCl4 post valve closed
1/11/2012	12:58:30 AM	Bypass valve closed
1/11/2012	12:58:30 AM	Bubbler valve closed
1/11/2012	12:58:30 AM	Helium valve opened
1/11/2012	12:58:30 AM	Main Vac valve opened
1/11/2012	12:58:30 AM	Helium MFC set to  20.000000
1/11/2012	12:58:30 AM	H2 MFC set to  0.000000
1/11/2012	12:58:30 AM	BCl3 MFC set to  0.000000
1/11/2012	12:58:30 AM	PH3 MFC set to  0.000000
1/11/2012	12:58:30 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:58:30 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:58:30 AM	Tube furnace set to 200
1/11/2012	12:59:00 AM	Helium valve closed
1/11/2012	12:59:00 AM	H2 valve closed
1/11/2012	12:59:00 AM	BCl3 valve closed
1/11/2012	12:59:00 AM	PH3 valve closed
1/11/2012	12:59:00 AM	SiCl4 pre valve closed
1/11/2012	12:59:00 AM	SiCl4 post valve closed
1/11/2012	12:59:00 AM	Bypass valve closed
1/11/2012	12:59:00 AM	Bubbler valve closed
1/11/2012	12:59:00 AM	Main Vac valve opened
1/11/2012	12:59:00 AM	Helium MFC set to  0.000000
1/11/2012	12:59:00 AM	H2 MFC set to  0.000000
1/11/2012	12:59:00 AM	BCl3 MFC set to  0.000000
1/11/2012	12:59:00 AM	PH3 MFC set to  0.000000
1/11/2012	12:59:00 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:59:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:59:00 AM	Tube furnace set to 200
1/11/2012	12:59:31 AM	H2 valve closed
1/11/2012	12:59:31 AM	BCl3 valve closed
1/11/2012	12:59:31 AM	PH3 valve closed
1/11/2012	12:59:31 AM	SiCl4 pre valve closed
1/11/2012	12:59:31 AM	SiCl4 post valve closed
1/11/2012	12:59:31 AM	Bypass valve closed
1/11/2012	12:59:31 AM	Bubbler valve closed
1/11/2012	12:59:31 AM	Helium valve opened
1/11/2012	12:59:31 AM	Main Vac valve opened
1/11/2012	12:59:31 AM	Helium MFC set to  20.000000
1/11/2012	12:59:31 AM	H2 MFC set to  0.000000
1/11/2012	12:59:31 AM	BCl3 MFC set to  0.000000
1/11/2012	12:59:31 AM	PH3 MFC set to  0.000000
1/11/2012	12:59:31 AM	SiCl4 MFC set to  0.000000
1/11/2012	12:59:31 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	12:59:31 AM	Tube furnace set to 200
1/11/2012	1:00:01 AM	Helium valve closed
1/11/2012	1:00:01 AM	H2 valve closed
1/11/2012	1:00:01 AM	BCl3 valve closed
1/11/2012	1:00:01 AM	PH3 valve closed
1/11/2012	1:00:01 AM	SiCl4 pre valve closed
1/11/2012	1:00:01 AM	SiCl4 post valve closed
1/11/2012	1:00:01 AM	Bypass valve closed
1/11/2012	1:00:01 AM	Bubbler valve closed
1/11/2012	1:00:01 AM	Main Vac valve opened
1/11/2012	1:00:01 AM	Helium MFC set to  0.000000
1/11/2012	1:00:01 AM	H2 MFC set to  0.000000
1/11/2012	1:00:01 AM	BCl3 MFC set to  0.000000
1/11/2012	1:00:01 AM	PH3 MFC set to  0.000000
1/11/2012	1:00:01 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:00:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:00:01 AM	Tube furnace set to 200
1/11/2012	1:00:31 AM	H2 valve closed
1/11/2012	1:00:31 AM	BCl3 valve closed
1/11/2012	1:00:31 AM	PH3 valve closed
1/11/2012	1:00:31 AM	SiCl4 pre valve closed
1/11/2012	1:00:31 AM	SiCl4 post valve closed
1/11/2012	1:00:31 AM	Bypass valve closed
1/11/2012	1:00:31 AM	Bubbler valve closed
1/11/2012	1:00:31 AM	Helium valve opened
1/11/2012	1:00:31 AM	Main Vac valve opened
1/11/2012	1:00:31 AM	Helium MFC set to  20.000000
1/11/2012	1:00:31 AM	H2 MFC set to  0.000000
1/11/2012	1:00:31 AM	BCl3 MFC set to  0.000000
1/11/2012	1:00:31 AM	PH3 MFC set to  0.000000
1/11/2012	1:00:31 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:00:31 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:00:31 AM	Tube furnace set to 200
1/11/2012	1:01:01 AM	Helium valve closed
1/11/2012	1:01:01 AM	H2 valve closed
1/11/2012	1:01:01 AM	BCl3 valve closed
1/11/2012	1:01:01 AM	PH3 valve closed
1/11/2012	1:01:01 AM	SiCl4 pre valve closed
1/11/2012	1:01:01 AM	SiCl4 post valve closed
1/11/2012	1:01:01 AM	Bypass valve closed
1/11/2012	1:01:01 AM	Bubbler valve closed
1/11/2012	1:01:01 AM	Main Vac valve opened
1/11/2012	1:01:01 AM	Helium MFC set to  0.000000
1/11/2012	1:01:01 AM	H2 MFC set to  0.000000
1/11/2012	1:01:01 AM	BCl3 MFC set to  0.000000
1/11/2012	1:01:01 AM	PH3 MFC set to  0.000000
1/11/2012	1:01:01 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:01:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:01:01 AM	Tube furnace set to 200
1/11/2012	1:01:31 AM	H2 valve closed
1/11/2012	1:01:31 AM	BCl3 valve closed
1/11/2012	1:01:31 AM	PH3 valve closed
1/11/2012	1:01:31 AM	SiCl4 pre valve closed
1/11/2012	1:01:31 AM	SiCl4 post valve closed
1/11/2012	1:01:31 AM	Bypass valve closed
1/11/2012	1:01:31 AM	Bubbler valve closed
1/11/2012	1:01:31 AM	Helium valve opened
1/11/2012	1:01:31 AM	Main Vac valve opened
1/11/2012	1:01:31 AM	Helium MFC set to  20.000000
1/11/2012	1:01:31 AM	H2 MFC set to  0.000000
1/11/2012	1:01:31 AM	BCl3 MFC set to  0.000000
1/11/2012	1:01:31 AM	PH3 MFC set to  0.000000
1/11/2012	1:01:31 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:01:31 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:01:32 AM	Tube furnace set to 200
1/11/2012	1:02:02 AM	Helium valve closed
1/11/2012	1:02:02 AM	H2 valve closed
1/11/2012	1:02:02 AM	BCl3 valve closed
1/11/2012	1:02:02 AM	PH3 valve closed
1/11/2012	1:02:02 AM	SiCl4 pre valve closed
1/11/2012	1:02:02 AM	SiCl4 post valve closed
1/11/2012	1:02:02 AM	Bypass valve closed
1/11/2012	1:02:02 AM	Bubbler valve closed
1/11/2012	1:02:02 AM	Main Vac valve opened
1/11/2012	1:02:02 AM	Helium MFC set to  0.000000
1/11/2012	1:02:02 AM	H2 MFC set to  0.000000
1/11/2012	1:02:02 AM	BCl3 MFC set to  0.000000
1/11/2012	1:02:02 AM	PH3 MFC set to  0.000000
1/11/2012	1:02:02 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:02:02 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:02:02 AM	Tube furnace set to 200
1/11/2012	1:02:32 AM	H2 valve closed
1/11/2012	1:02:32 AM	BCl3 valve closed
1/11/2012	1:02:32 AM	PH3 valve closed
1/11/2012	1:02:32 AM	SiCl4 pre valve closed
1/11/2012	1:02:32 AM	SiCl4 post valve closed
1/11/2012	1:02:32 AM	Bypass valve closed
1/11/2012	1:02:32 AM	Bubbler valve closed
1/11/2012	1:02:32 AM	Helium valve opened
1/11/2012	1:02:32 AM	Main Vac valve opened
1/11/2012	1:02:32 AM	Helium MFC set to  20.000000
1/11/2012	1:02:32 AM	H2 MFC set to  0.000000
1/11/2012	1:02:32 AM	BCl3 MFC set to  0.000000
1/11/2012	1:02:32 AM	PH3 MFC set to  0.000000
1/11/2012	1:02:32 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:02:32 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:02:32 AM	Tube furnace set to 200
1/11/2012	1:03:02 AM	Helium valve closed
1/11/2012	1:03:02 AM	H2 valve closed
1/11/2012	1:03:02 AM	BCl3 valve closed
1/11/2012	1:03:02 AM	PH3 valve closed
1/11/2012	1:03:02 AM	SiCl4 pre valve closed
1/11/2012	1:03:02 AM	SiCl4 post valve closed
1/11/2012	1:03:02 AM	Bypass valve closed
1/11/2012	1:03:02 AM	Bubbler valve closed
1/11/2012	1:03:02 AM	Main Vac valve opened
1/11/2012	1:03:02 AM	Helium MFC set to  0.000000
1/11/2012	1:03:02 AM	H2 MFC set to  0.000000
1/11/2012	1:03:02 AM	BCl3 MFC set to  0.000000
1/11/2012	1:03:02 AM	PH3 MFC set to  0.000000
1/11/2012	1:03:02 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:03:02 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:03:02 AM	Tube furnace set to 0
1/11/2012	1:03:03 AM	Run finished at 1:03 AM
1/11/2012	1:12:23 AM	Main Vac valve closed
1/11/2012	1:12:30 AM	Main Vac valve opened
1/11/2012	1:12:44 AM	Recipe started at 1:12 AM
1/11/2012	1:12:44 AM	Helium valve closed
1/11/2012	1:12:44 AM	H2 valve closed
1/11/2012	1:12:44 AM	BCl3 valve closed
1/11/2012	1:12:44 AM	PH3 valve closed
1/11/2012	1:12:44 AM	SiCl4 pre valve closed
1/11/2012	1:12:44 AM	SiCl4 post valve closed
1/11/2012	1:12:44 AM	Bypass valve closed
1/11/2012	1:12:44 AM	Bubbler valve closed
1/11/2012	1:12:44 AM	Main Vac valve opened
1/11/2012	1:12:44 AM	Helium MFC set to  0.000000
1/11/2012	1:12:44 AM	H2 MFC set to  0.000000
1/11/2012	1:12:44 AM	BCl3 MFC set to  0.000000
1/11/2012	1:12:44 AM	PH3 MFC set to  0.000000
1/11/2012	1:12:44 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:12:44 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:12:44 AM	Tube furnace set to 0
1/11/2012	1:13:14 AM	H2 valve closed
1/11/2012	1:13:14 AM	BCl3 valve closed
1/11/2012	1:13:14 AM	PH3 valve closed
1/11/2012	1:13:14 AM	SiCl4 pre valve closed
1/11/2012	1:13:14 AM	SiCl4 post valve closed
1/11/2012	1:13:14 AM	Bypass valve closed
1/11/2012	1:13:14 AM	Bubbler valve closed
1/11/2012	1:13:14 AM	Helium valve opened
1/11/2012	1:13:14 AM	Main Vac valve opened
1/11/2012	1:13:14 AM	Helium MFC set to  20.000000
1/11/2012	1:13:14 AM	H2 MFC set to  0.000000
1/11/2012	1:13:14 AM	BCl3 MFC set to  0.000000
1/11/2012	1:13:14 AM	PH3 MFC set to  0.000000
1/11/2012	1:13:14 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:13:14 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:13:14 AM	Tube furnace set to 0
1/11/2012	1:13:44 AM	Helium valve closed
1/11/2012	1:13:44 AM	H2 valve closed
1/11/2012	1:13:44 AM	BCl3 valve closed
1/11/2012	1:13:44 AM	PH3 valve closed
1/11/2012	1:13:44 AM	SiCl4 pre valve closed
1/11/2012	1:13:44 AM	SiCl4 post valve closed
1/11/2012	1:13:44 AM	Bypass valve closed
1/11/2012	1:13:44 AM	Bubbler valve closed
1/11/2012	1:13:44 AM	Main Vac valve opened
1/11/2012	1:13:44 AM	Helium MFC set to  0.000000
1/11/2012	1:13:44 AM	H2 MFC set to  0.000000
1/11/2012	1:13:44 AM	BCl3 MFC set to  0.000000
1/11/2012	1:13:44 AM	PH3 MFC set to  0.000000
1/11/2012	1:13:44 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:13:44 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:13:45 AM	Tube furnace set to 0
1/11/2012	1:14:15 AM	H2 valve closed
1/11/2012	1:14:15 AM	BCl3 valve closed
1/11/2012	1:14:15 AM	PH3 valve closed
1/11/2012	1:14:15 AM	SiCl4 pre valve closed
1/11/2012	1:14:15 AM	SiCl4 post valve closed
1/11/2012	1:14:15 AM	Bypass valve closed
1/11/2012	1:14:15 AM	Bubbler valve closed
1/11/2012	1:14:15 AM	Helium valve opened
1/11/2012	1:14:15 AM	Main Vac valve opened
1/11/2012	1:14:15 AM	Helium MFC set to  20.000000
1/11/2012	1:14:15 AM	H2 MFC set to  0.000000
1/11/2012	1:14:15 AM	BCl3 MFC set to  0.000000
1/11/2012	1:14:15 AM	PH3 MFC set to  0.000000
1/11/2012	1:14:15 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:14:15 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:14:15 AM	Tube furnace set to 0
1/11/2012	1:14:45 AM	Helium valve closed
1/11/2012	1:14:45 AM	H2 valve closed
1/11/2012	1:14:45 AM	BCl3 valve closed
1/11/2012	1:14:45 AM	PH3 valve closed
1/11/2012	1:14:45 AM	SiCl4 pre valve closed
1/11/2012	1:14:45 AM	SiCl4 post valve closed
1/11/2012	1:14:45 AM	Bypass valve closed
1/11/2012	1:14:45 AM	Bubbler valve closed
1/11/2012	1:14:45 AM	Main Vac valve opened
1/11/2012	1:14:45 AM	Helium MFC set to  0.000000
1/11/2012	1:14:45 AM	H2 MFC set to  0.000000
1/11/2012	1:14:45 AM	BCl3 MFC set to  0.000000
1/11/2012	1:14:45 AM	PH3 MFC set to  0.000000
1/11/2012	1:14:45 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:14:45 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:14:45 AM	Tube furnace set to 0
1/11/2012	1:15:15 AM	H2 valve closed
1/11/2012	1:15:15 AM	BCl3 valve closed
1/11/2012	1:15:15 AM	PH3 valve closed
1/11/2012	1:15:15 AM	SiCl4 pre valve closed
1/11/2012	1:15:15 AM	SiCl4 post valve closed
1/11/2012	1:15:15 AM	Bypass valve closed
1/11/2012	1:15:15 AM	Bubbler valve closed
1/11/2012	1:15:15 AM	Helium valve opened
1/11/2012	1:15:15 AM	Main Vac valve opened
1/11/2012	1:15:15 AM	Helium MFC set to  20.000000
1/11/2012	1:15:15 AM	H2 MFC set to  0.000000
1/11/2012	1:15:15 AM	BCl3 MFC set to  0.000000
1/11/2012	1:15:15 AM	PH3 MFC set to  0.000000
1/11/2012	1:15:15 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:15:15 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:15:15 AM	Tube furnace set to 0
1/11/2012	1:15:45 AM	Helium valve closed
1/11/2012	1:15:45 AM	H2 valve closed
1/11/2012	1:15:45 AM	BCl3 valve closed
1/11/2012	1:15:45 AM	PH3 valve closed
1/11/2012	1:15:45 AM	SiCl4 pre valve closed
1/11/2012	1:15:45 AM	SiCl4 post valve closed
1/11/2012	1:15:45 AM	Bypass valve closed
1/11/2012	1:15:45 AM	Bubbler valve closed
1/11/2012	1:15:45 AM	Main Vac valve opened
1/11/2012	1:15:45 AM	Helium MFC set to  0.000000
1/11/2012	1:15:45 AM	H2 MFC set to  0.000000
1/11/2012	1:15:45 AM	BCl3 MFC set to  0.000000
1/11/2012	1:15:45 AM	PH3 MFC set to  0.000000
1/11/2012	1:15:45 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:15:45 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:15:45 AM	Tube furnace set to 0
1/11/2012	1:16:15 AM	H2 valve closed
1/11/2012	1:16:15 AM	BCl3 valve closed
1/11/2012	1:16:15 AM	PH3 valve closed
1/11/2012	1:16:15 AM	SiCl4 pre valve closed
1/11/2012	1:16:15 AM	SiCl4 post valve closed
1/11/2012	1:16:15 AM	Bypass valve closed
1/11/2012	1:16:15 AM	Bubbler valve closed
1/11/2012	1:16:15 AM	Helium valve opened
1/11/2012	1:16:15 AM	Main Vac valve opened
1/11/2012	1:16:16 AM	Helium MFC set to  20.000000
1/11/2012	1:16:16 AM	H2 MFC set to  0.000000
1/11/2012	1:16:16 AM	BCl3 MFC set to  0.000000
1/11/2012	1:16:16 AM	PH3 MFC set to  0.000000
1/11/2012	1:16:16 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:16:16 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:16:16 AM	Tube furnace set to 0
1/11/2012	1:16:46 AM	Helium valve closed
1/11/2012	1:16:46 AM	H2 valve closed
1/11/2012	1:16:46 AM	BCl3 valve closed
1/11/2012	1:16:46 AM	PH3 valve closed
1/11/2012	1:16:46 AM	SiCl4 pre valve closed
1/11/2012	1:16:46 AM	SiCl4 post valve closed
1/11/2012	1:16:46 AM	Bypass valve closed
1/11/2012	1:16:46 AM	Bubbler valve closed
1/11/2012	1:16:46 AM	Main Vac valve opened
1/11/2012	1:16:46 AM	Helium MFC set to  0.000000
1/11/2012	1:16:46 AM	H2 MFC set to  0.000000
1/11/2012	1:16:46 AM	BCl3 MFC set to  0.000000
1/11/2012	1:16:46 AM	PH3 MFC set to  0.000000
1/11/2012	1:16:46 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:16:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:16:46 AM	Tube furnace set to 0
1/11/2012	1:17:16 AM	H2 valve closed
1/11/2012	1:17:16 AM	BCl3 valve closed
1/11/2012	1:17:16 AM	PH3 valve closed
1/11/2012	1:17:16 AM	SiCl4 pre valve closed
1/11/2012	1:17:16 AM	SiCl4 post valve closed
1/11/2012	1:17:16 AM	Bypass valve closed
1/11/2012	1:17:16 AM	Bubbler valve closed
1/11/2012	1:17:16 AM	Helium valve opened
1/11/2012	1:17:16 AM	Main Vac valve opened
1/11/2012	1:17:16 AM	Helium MFC set to  20.000000
1/11/2012	1:17:16 AM	H2 MFC set to  0.000000
1/11/2012	1:17:16 AM	BCl3 MFC set to  0.000000
1/11/2012	1:17:16 AM	PH3 MFC set to  0.000000
1/11/2012	1:17:16 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:17:16 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:17:16 AM	Tube furnace set to 0
1/11/2012	1:17:46 AM	Helium valve closed
1/11/2012	1:17:46 AM	H2 valve closed
1/11/2012	1:17:46 AM	BCl3 valve closed
1/11/2012	1:17:46 AM	PH3 valve closed
1/11/2012	1:17:46 AM	SiCl4 pre valve closed
1/11/2012	1:17:46 AM	SiCl4 post valve closed
1/11/2012	1:17:46 AM	Bypass valve closed
1/11/2012	1:17:46 AM	Bubbler valve closed
1/11/2012	1:17:46 AM	Main Vac valve opened
1/11/2012	1:17:46 AM	Helium MFC set to  0.000000
1/11/2012	1:17:46 AM	H2 MFC set to  0.000000
1/11/2012	1:17:46 AM	BCl3 MFC set to  0.000000
1/11/2012	1:17:46 AM	PH3 MFC set to  0.000000
1/11/2012	1:17:46 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:17:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:17:46 AM	Tube furnace set to 0
1/11/2012	1:18:16 AM	H2 valve closed
1/11/2012	1:18:16 AM	BCl3 valve closed
1/11/2012	1:18:16 AM	PH3 valve closed
1/11/2012	1:18:16 AM	SiCl4 pre valve closed
1/11/2012	1:18:16 AM	SiCl4 post valve closed
1/11/2012	1:18:16 AM	Bypass valve closed
1/11/2012	1:18:16 AM	Bubbler valve closed
1/11/2012	1:18:16 AM	Helium valve opened
1/11/2012	1:18:16 AM	Main Vac valve opened
1/11/2012	1:18:16 AM	Helium MFC set to  20.000000
1/11/2012	1:18:16 AM	H2 MFC set to  0.000000
1/11/2012	1:18:16 AM	BCl3 MFC set to  0.000000
1/11/2012	1:18:16 AM	PH3 MFC set to  0.000000
1/11/2012	1:18:16 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:18:16 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:18:16 AM	Tube furnace set to 0
1/11/2012	1:18:46 AM	Helium valve closed
1/11/2012	1:18:46 AM	H2 valve closed
1/11/2012	1:18:47 AM	BCl3 valve closed
1/11/2012	1:18:47 AM	PH3 valve closed
1/11/2012	1:18:47 AM	SiCl4 pre valve closed
1/11/2012	1:18:47 AM	SiCl4 post valve closed
1/11/2012	1:18:47 AM	Bypass valve closed
1/11/2012	1:18:47 AM	Bubbler valve closed
1/11/2012	1:18:47 AM	Main Vac valve opened
1/11/2012	1:18:47 AM	Helium MFC set to  0.000000
1/11/2012	1:18:47 AM	H2 MFC set to  0.000000
1/11/2012	1:18:47 AM	BCl3 MFC set to  0.000000
1/11/2012	1:18:47 AM	PH3 MFC set to  0.000000
1/11/2012	1:18:47 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:18:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:18:47 AM	Tube furnace set to 0
1/11/2012	1:19:17 AM	H2 valve closed
1/11/2012	1:19:17 AM	BCl3 valve closed
1/11/2012	1:19:17 AM	PH3 valve closed
1/11/2012	1:19:17 AM	SiCl4 pre valve closed
1/11/2012	1:19:17 AM	SiCl4 post valve closed
1/11/2012	1:19:17 AM	Bypass valve closed
1/11/2012	1:19:17 AM	Bubbler valve closed
1/11/2012	1:19:17 AM	Helium valve opened
1/11/2012	1:19:17 AM	Main Vac valve opened
1/11/2012	1:19:17 AM	Helium MFC set to  20.000000
1/11/2012	1:19:17 AM	H2 MFC set to  0.000000
1/11/2012	1:19:17 AM	BCl3 MFC set to  0.000000
1/11/2012	1:19:17 AM	PH3 MFC set to  0.000000
1/11/2012	1:19:17 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:19:17 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:19:17 AM	Tube furnace set to 0
1/11/2012	1:19:47 AM	Helium valve closed
1/11/2012	1:19:47 AM	H2 valve closed
1/11/2012	1:19:47 AM	BCl3 valve closed
1/11/2012	1:19:47 AM	PH3 valve closed
1/11/2012	1:19:47 AM	SiCl4 pre valve closed
1/11/2012	1:19:47 AM	SiCl4 post valve closed
1/11/2012	1:19:47 AM	Bypass valve closed
1/11/2012	1:19:47 AM	Bubbler valve closed
1/11/2012	1:19:47 AM	Main Vac valve opened
1/11/2012	1:19:47 AM	Helium MFC set to  0.000000
1/11/2012	1:19:47 AM	H2 MFC set to  0.000000
1/11/2012	1:19:47 AM	BCl3 MFC set to  0.000000
1/11/2012	1:19:47 AM	PH3 MFC set to  0.000000
1/11/2012	1:19:47 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:19:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:19:47 AM	Tube furnace set to 0
1/11/2012	1:20:17 AM	H2 valve closed
1/11/2012	1:20:17 AM	BCl3 valve closed
1/11/2012	1:20:17 AM	PH3 valve closed
1/11/2012	1:20:17 AM	SiCl4 pre valve closed
1/11/2012	1:20:17 AM	SiCl4 post valve closed
1/11/2012	1:20:17 AM	Bypass valve closed
1/11/2012	1:20:17 AM	Bubbler valve closed
1/11/2012	1:20:17 AM	Helium valve opened
1/11/2012	1:20:17 AM	Main Vac valve opened
1/11/2012	1:20:17 AM	Helium MFC set to  20.000000
1/11/2012	1:20:17 AM	H2 MFC set to  0.000000
1/11/2012	1:20:17 AM	BCl3 MFC set to  0.000000
1/11/2012	1:20:17 AM	PH3 MFC set to  0.000000
1/11/2012	1:20:17 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:20:17 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:20:17 AM	Tube furnace set to 0
1/11/2012	1:20:47 AM	Helium valve closed
1/11/2012	1:20:47 AM	H2 valve closed
1/11/2012	1:20:47 AM	BCl3 valve closed
1/11/2012	1:20:47 AM	PH3 valve closed
1/11/2012	1:20:47 AM	SiCl4 pre valve closed
1/11/2012	1:20:47 AM	SiCl4 post valve closed
1/11/2012	1:20:47 AM	Bypass valve closed
1/11/2012	1:20:47 AM	Bubbler valve closed
1/11/2012	1:20:47 AM	Main Vac valve opened
1/11/2012	1:20:47 AM	Helium MFC set to  0.000000
1/11/2012	1:20:47 AM	H2 MFC set to  0.000000
1/11/2012	1:20:47 AM	BCl3 MFC set to  0.000000
1/11/2012	1:20:47 AM	PH3 MFC set to  0.000000
1/11/2012	1:20:47 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:20:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:20:47 AM	Tube furnace set to 0
1/11/2012	1:21:18 AM	H2 valve closed
1/11/2012	1:21:18 AM	BCl3 valve closed
1/11/2012	1:21:18 AM	PH3 valve closed
1/11/2012	1:21:18 AM	SiCl4 pre valve closed
1/11/2012	1:21:18 AM	SiCl4 post valve closed
1/11/2012	1:21:18 AM	Bypass valve closed
1/11/2012	1:21:18 AM	Bubbler valve closed
1/11/2012	1:21:18 AM	Helium valve opened
1/11/2012	1:21:18 AM	Main Vac valve opened
1/11/2012	1:21:18 AM	Helium MFC set to  20.000000
1/11/2012	1:21:18 AM	H2 MFC set to  0.000000
1/11/2012	1:21:18 AM	BCl3 MFC set to  0.000000
1/11/2012	1:21:18 AM	PH3 MFC set to  0.000000
1/11/2012	1:21:18 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:21:18 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:21:18 AM	Tube furnace set to 0
1/11/2012	1:21:48 AM	Helium valve closed
1/11/2012	1:21:48 AM	H2 valve closed
1/11/2012	1:21:48 AM	BCl3 valve closed
1/11/2012	1:21:48 AM	PH3 valve closed
1/11/2012	1:21:48 AM	SiCl4 pre valve closed
1/11/2012	1:21:48 AM	SiCl4 post valve closed
1/11/2012	1:21:48 AM	Bypass valve closed
1/11/2012	1:21:48 AM	Bubbler valve closed
1/11/2012	1:21:48 AM	Main Vac valve opened
1/11/2012	1:21:48 AM	Helium MFC set to  0.000000
1/11/2012	1:21:48 AM	H2 MFC set to  0.000000
1/11/2012	1:21:48 AM	BCl3 MFC set to  0.000000
1/11/2012	1:21:48 AM	PH3 MFC set to  0.000000
1/11/2012	1:21:48 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:21:48 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:21:48 AM	Tube furnace set to 200
1/11/2012	1:22:18 AM	H2 valve closed
1/11/2012	1:22:18 AM	BCl3 valve closed
1/11/2012	1:22:18 AM	PH3 valve closed
1/11/2012	1:22:18 AM	SiCl4 pre valve closed
1/11/2012	1:22:18 AM	SiCl4 post valve closed
1/11/2012	1:22:18 AM	Bypass valve closed
1/11/2012	1:22:18 AM	Bubbler valve closed
1/11/2012	1:22:18 AM	Helium valve opened
1/11/2012	1:22:18 AM	Main Vac valve opened
1/11/2012	1:22:18 AM	Helium MFC set to  20.000000
1/11/2012	1:22:18 AM	H2 MFC set to  0.000000
1/11/2012	1:22:18 AM	BCl3 MFC set to  0.000000
1/11/2012	1:22:18 AM	PH3 MFC set to  0.000000
1/11/2012	1:22:18 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:22:18 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:22:18 AM	Tube furnace set to 200
1/11/2012	1:22:48 AM	Helium valve closed
1/11/2012	1:22:48 AM	H2 valve closed
1/11/2012	1:22:48 AM	BCl3 valve closed
1/11/2012	1:22:48 AM	PH3 valve closed
1/11/2012	1:22:48 AM	SiCl4 pre valve closed
1/11/2012	1:22:48 AM	SiCl4 post valve closed
1/11/2012	1:22:48 AM	Bypass valve closed
1/11/2012	1:22:48 AM	Bubbler valve closed
1/11/2012	1:22:48 AM	Main Vac valve opened
1/11/2012	1:22:48 AM	Helium MFC set to  0.000000
1/11/2012	1:22:48 AM	H2 MFC set to  0.000000
1/11/2012	1:22:48 AM	BCl3 MFC set to  0.000000
1/11/2012	1:22:48 AM	PH3 MFC set to  0.000000
1/11/2012	1:22:48 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:22:48 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:22:48 AM	Tube furnace set to 200
1/11/2012	1:23:18 AM	H2 valve closed
1/11/2012	1:23:18 AM	BCl3 valve closed
1/11/2012	1:23:18 AM	PH3 valve closed
1/11/2012	1:23:18 AM	SiCl4 pre valve closed
1/11/2012	1:23:18 AM	SiCl4 post valve closed
1/11/2012	1:23:18 AM	Bypass valve closed
1/11/2012	1:23:18 AM	Bubbler valve closed
1/11/2012	1:23:18 AM	Helium valve opened
1/11/2012	1:23:18 AM	Main Vac valve opened
1/11/2012	1:23:18 AM	Helium MFC set to  20.000000
1/11/2012	1:23:18 AM	H2 MFC set to  0.000000
1/11/2012	1:23:18 AM	BCl3 MFC set to  0.000000
1/11/2012	1:23:18 AM	PH3 MFC set to  0.000000
1/11/2012	1:23:18 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:23:18 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:23:19 AM	Tube furnace set to 200
1/11/2012	1:23:49 AM	Helium valve closed
1/11/2012	1:23:49 AM	H2 valve closed
1/11/2012	1:23:49 AM	BCl3 valve closed
1/11/2012	1:23:49 AM	PH3 valve closed
1/11/2012	1:23:49 AM	SiCl4 pre valve closed
1/11/2012	1:23:49 AM	SiCl4 post valve closed
1/11/2012	1:23:49 AM	Bypass valve closed
1/11/2012	1:23:49 AM	Bubbler valve closed
1/11/2012	1:23:49 AM	Main Vac valve opened
1/11/2012	1:23:49 AM	Helium MFC set to  0.000000
1/11/2012	1:23:49 AM	H2 MFC set to  0.000000
1/11/2012	1:23:49 AM	BCl3 MFC set to  0.000000
1/11/2012	1:23:49 AM	PH3 MFC set to  0.000000
1/11/2012	1:23:49 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:23:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:23:49 AM	Tube furnace set to 200
1/11/2012	1:24:19 AM	H2 valve closed
1/11/2012	1:24:19 AM	BCl3 valve closed
1/11/2012	1:24:19 AM	PH3 valve closed
1/11/2012	1:24:19 AM	SiCl4 pre valve closed
1/11/2012	1:24:19 AM	SiCl4 post valve closed
1/11/2012	1:24:19 AM	Bypass valve closed
1/11/2012	1:24:19 AM	Bubbler valve closed
1/11/2012	1:24:19 AM	Helium valve opened
1/11/2012	1:24:19 AM	Main Vac valve opened
1/11/2012	1:24:19 AM	Helium MFC set to  20.000000
1/11/2012	1:24:19 AM	H2 MFC set to  0.000000
1/11/2012	1:24:19 AM	BCl3 MFC set to  0.000000
1/11/2012	1:24:19 AM	PH3 MFC set to  0.000000
1/11/2012	1:24:19 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:24:19 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:24:19 AM	Tube furnace set to 200
1/11/2012	1:24:49 AM	Helium valve closed
1/11/2012	1:24:49 AM	H2 valve closed
1/11/2012	1:24:49 AM	BCl3 valve closed
1/11/2012	1:24:49 AM	PH3 valve closed
1/11/2012	1:24:49 AM	SiCl4 pre valve closed
1/11/2012	1:24:49 AM	SiCl4 post valve closed
1/11/2012	1:24:49 AM	Bypass valve closed
1/11/2012	1:24:49 AM	Bubbler valve closed
1/11/2012	1:24:49 AM	Main Vac valve opened
1/11/2012	1:24:49 AM	Helium MFC set to  0.000000
1/11/2012	1:24:49 AM	H2 MFC set to  0.000000
1/11/2012	1:24:49 AM	BCl3 MFC set to  0.000000
1/11/2012	1:24:49 AM	PH3 MFC set to  0.000000
1/11/2012	1:24:49 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:24:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:24:49 AM	Tube furnace set to 200
1/11/2012	1:25:19 AM	H2 valve closed
1/11/2012	1:25:19 AM	BCl3 valve closed
1/11/2012	1:25:19 AM	PH3 valve closed
1/11/2012	1:25:19 AM	SiCl4 pre valve closed
1/11/2012	1:25:19 AM	SiCl4 post valve closed
1/11/2012	1:25:19 AM	Bypass valve closed
1/11/2012	1:25:19 AM	Bubbler valve closed
1/11/2012	1:25:19 AM	Helium valve opened
1/11/2012	1:25:19 AM	Main Vac valve opened
1/11/2012	1:25:19 AM	Helium MFC set to  20.000000
1/11/2012	1:25:19 AM	H2 MFC set to  0.000000
1/11/2012	1:25:19 AM	BCl3 MFC set to  0.000000
1/11/2012	1:25:19 AM	PH3 MFC set to  0.000000
1/11/2012	1:25:19 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:25:19 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:25:19 AM	Tube furnace set to 200
1/11/2012	1:25:49 AM	Helium valve closed
1/11/2012	1:25:49 AM	H2 valve closed
1/11/2012	1:25:49 AM	BCl3 valve closed
1/11/2012	1:25:49 AM	PH3 valve closed
1/11/2012	1:25:49 AM	SiCl4 pre valve closed
1/11/2012	1:25:49 AM	SiCl4 post valve closed
1/11/2012	1:25:49 AM	Bypass valve closed
1/11/2012	1:25:49 AM	Bubbler valve closed
1/11/2012	1:25:49 AM	Main Vac valve opened
1/11/2012	1:25:49 AM	Helium MFC set to  0.000000
1/11/2012	1:25:49 AM	H2 MFC set to  0.000000
1/11/2012	1:25:49 AM	BCl3 MFC set to  0.000000
1/11/2012	1:25:49 AM	PH3 MFC set to  0.000000
1/11/2012	1:25:49 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:25:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:25:50 AM	Tube furnace set to 200
1/11/2012	1:26:20 AM	H2 valve closed
1/11/2012	1:26:20 AM	BCl3 valve closed
1/11/2012	1:26:20 AM	PH3 valve closed
1/11/2012	1:26:20 AM	SiCl4 pre valve closed
1/11/2012	1:26:20 AM	SiCl4 post valve closed
1/11/2012	1:26:20 AM	Bypass valve closed
1/11/2012	1:26:20 AM	Bubbler valve closed
1/11/2012	1:26:20 AM	Helium valve opened
1/11/2012	1:26:20 AM	Main Vac valve opened
1/11/2012	1:26:20 AM	Helium MFC set to  20.000000
1/11/2012	1:26:20 AM	H2 MFC set to  0.000000
1/11/2012	1:26:20 AM	BCl3 MFC set to  0.000000
1/11/2012	1:26:20 AM	PH3 MFC set to  0.000000
1/11/2012	1:26:20 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:26:20 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:26:20 AM	Tube furnace set to 200
1/11/2012	1:26:50 AM	Helium valve closed
1/11/2012	1:26:50 AM	H2 valve closed
1/11/2012	1:26:50 AM	BCl3 valve closed
1/11/2012	1:26:50 AM	PH3 valve closed
1/11/2012	1:26:50 AM	SiCl4 pre valve closed
1/11/2012	1:26:50 AM	SiCl4 post valve closed
1/11/2012	1:26:50 AM	Bypass valve closed
1/11/2012	1:26:50 AM	Bubbler valve closed
1/11/2012	1:26:50 AM	Main Vac valve opened
1/11/2012	1:26:50 AM	Helium MFC set to  0.000000
1/11/2012	1:26:50 AM	H2 MFC set to  0.000000
1/11/2012	1:26:50 AM	BCl3 MFC set to  0.000000
1/11/2012	1:26:50 AM	PH3 MFC set to  0.000000
1/11/2012	1:26:50 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:26:50 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:26:50 AM	Tube furnace set to 200
1/11/2012	1:27:20 AM	H2 valve closed
1/11/2012	1:27:20 AM	BCl3 valve closed
1/11/2012	1:27:20 AM	PH3 valve closed
1/11/2012	1:27:20 AM	SiCl4 pre valve closed
1/11/2012	1:27:20 AM	SiCl4 post valve closed
1/11/2012	1:27:20 AM	Bypass valve closed
1/11/2012	1:27:20 AM	Bubbler valve closed
1/11/2012	1:27:20 AM	Helium valve opened
1/11/2012	1:27:20 AM	Main Vac valve opened
1/11/2012	1:27:20 AM	Helium MFC set to  20.000000
1/11/2012	1:27:20 AM	H2 MFC set to  0.000000
1/11/2012	1:27:20 AM	BCl3 MFC set to  0.000000
1/11/2012	1:27:20 AM	PH3 MFC set to  0.000000
1/11/2012	1:27:20 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:27:20 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:27:20 AM	Tube furnace set to 200
1/11/2012	1:27:50 AM	Helium valve closed
1/11/2012	1:27:50 AM	H2 valve closed
1/11/2012	1:27:50 AM	BCl3 valve closed
1/11/2012	1:27:50 AM	PH3 valve closed
1/11/2012	1:27:50 AM	SiCl4 pre valve closed
1/11/2012	1:27:50 AM	SiCl4 post valve closed
1/11/2012	1:27:50 AM	Bypass valve closed
1/11/2012	1:27:50 AM	Bubbler valve closed
1/11/2012	1:27:50 AM	Main Vac valve opened
1/11/2012	1:27:50 AM	Helium MFC set to  0.000000
1/11/2012	1:27:50 AM	H2 MFC set to  0.000000
1/11/2012	1:27:50 AM	BCl3 MFC set to  0.000000
1/11/2012	1:27:50 AM	PH3 MFC set to  0.000000
1/11/2012	1:27:50 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:27:50 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:27:50 AM	Tube furnace set to 0
1/11/2012	1:27:51 AM	Run finished at 1:27 AM
1/11/2012	1:36:17 AM	Main Vac valve closed
1/11/2012	1:36:26 AM	Main Vac valve opened
1/11/2012	1:36:46 AM	Recipe started at 1:36 AM
1/11/2012	1:36:46 AM	Helium valve closed
1/11/2012	1:36:46 AM	H2 valve closed
1/11/2012	1:36:46 AM	BCl3 valve closed
1/11/2012	1:36:46 AM	PH3 valve closed
1/11/2012	1:36:46 AM	SiCl4 pre valve closed
1/11/2012	1:36:46 AM	SiCl4 post valve closed
1/11/2012	1:36:46 AM	Main Vac valve closed
1/11/2012	1:36:46 AM	Bypass valve closed
1/11/2012	1:36:46 AM	Bubbler valve closed
1/11/2012	1:36:46 AM	Helium MFC set to  0.000000
1/11/2012	1:36:46 AM	H2 MFC set to  0.000000
1/11/2012	1:36:46 AM	BCl3 MFC set to  0.000000
1/11/2012	1:36:46 AM	PH3 MFC set to  0.000000
1/11/2012	1:36:46 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:36:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:36:46 AM	Tube furnace set to 0
1/11/2012	1:36:49 AM	Helium valve closed
1/11/2012	1:36:49 AM	BCl3 valve closed
1/11/2012	1:36:49 AM	PH3 valve closed
1/11/2012	1:36:49 AM	SiCl4 pre valve closed
1/11/2012	1:36:49 AM	SiCl4 post valve closed
1/11/2012	1:36:49 AM	Main Vac valve closed
1/11/2012	1:36:49 AM	Bypass valve closed
1/11/2012	1:36:49 AM	Bubbler valve closed
1/11/2012	1:36:49 AM	H2 valve opened
1/11/2012	1:36:49 AM	Helium MFC set to  0.000000
1/11/2012	1:36:49 AM	H2 MFC set to  500.000000
1/11/2012	1:36:49 AM	BCl3 MFC set to  0.000000
1/11/2012	1:36:49 AM	PH3 MFC set to  0.000000
1/11/2012	1:36:49 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:36:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:36:49 AM	Tube furnace set to 0
1/11/2012	1:37:52 AM	Helium valve closed
1/11/2012	1:37:52 AM	BCl3 valve closed
1/11/2012	1:37:52 AM	PH3 valve closed
1/11/2012	1:37:52 AM	SiCl4 pre valve closed
1/11/2012	1:37:52 AM	SiCl4 post valve closed
1/11/2012	1:37:52 AM	Main Vac valve closed
1/11/2012	1:37:52 AM	Bypass valve closed
1/11/2012	1:37:52 AM	H2 valve opened
1/11/2012	1:37:52 AM	Bubbler valve opened
1/11/2012	1:37:52 AM	Helium MFC set to  0.000000
1/11/2012	1:37:53 AM	H2 MFC set to  500.000000
1/11/2012	1:37:53 AM	BCl3 MFC set to  0.000000
1/11/2012	1:37:53 AM	PH3 MFC set to  0.000000
1/11/2012	1:37:53 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:37:53 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:37:53 AM	Tube furnace set to 0
1/11/2012	1:37:54 AM	Helium valve closed
1/11/2012	1:37:54 AM	BCl3 valve closed
1/11/2012	1:37:54 AM	PH3 valve closed
1/11/2012	1:37:54 AM	SiCl4 pre valve closed
1/11/2012	1:37:54 AM	SiCl4 post valve closed
1/11/2012	1:37:54 AM	Main Vac valve closed
1/11/2012	1:37:54 AM	Bypass valve closed
1/11/2012	1:37:54 AM	H2 valve opened
1/11/2012	1:37:54 AM	Bubbler valve opened
1/11/2012	1:37:54 AM	Helium MFC set to  0.000000
1/11/2012	1:37:54 AM	H2 MFC set to  500.000000
1/11/2012	1:37:54 AM	BCl3 MFC set to  0.000000
1/11/2012	1:37:54 AM	PH3 MFC set to  0.000000
1/11/2012	1:37:54 AM	SiCl4 MFC set to  0.000000
1/11/2012	1:37:54 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:37:54 AM	Tube furnace set to 1000
1/11/2012	1:57:54 AM	Helium valve closed
1/11/2012	1:57:54 AM	BCl3 valve closed
1/11/2012	1:57:54 AM	Main Vac valve closed
1/11/2012	1:57:54 AM	Bypass valve closed
1/11/2012	1:57:54 AM	H2 valve opened
1/11/2012	1:57:54 AM	PH3 valve opened
1/11/2012	1:57:54 AM	SiCl4 pre valve opened
1/11/2012	1:57:54 AM	SiCl4 post valve opened
1/11/2012	1:57:54 AM	Bubbler valve opened
1/11/2012	1:57:54 AM	Helium MFC set to  0.000000
1/11/2012	1:57:54 AM	H2 MFC set to  500.000000
1/11/2012	1:57:54 AM	BCl3 MFC set to  0.000000
1/11/2012	1:57:54 AM	PH3 MFC set to  0.900000
1/11/2012	1:57:54 AM	SiCl4 MFC set to  25.000000
1/11/2012	1:57:54 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	1:57:54 AM	Tube furnace set to 1000
1/11/2012	2:23:54 AM	Helium valve closed
1/11/2012	2:23:54 AM	BCl3 valve closed
1/11/2012	2:23:54 AM	PH3 valve closed
1/11/2012	2:23:54 AM	SiCl4 pre valve closed
1/11/2012	2:23:54 AM	SiCl4 post valve closed
1/11/2012	2:23:54 AM	Main Vac valve closed
1/11/2012	2:23:54 AM	Bypass valve closed
1/11/2012	2:23:54 AM	H2 valve opened
1/11/2012	2:23:54 AM	Bubbler valve opened
1/11/2012	2:23:54 AM	Helium MFC set to  0.000000
1/11/2012	2:23:54 AM	H2 MFC set to  500.000000
1/11/2012	2:23:54 AM	BCl3 MFC set to  0.000000
1/11/2012	2:23:54 AM	PH3 MFC set to  0.000000
1/11/2012	2:23:54 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:23:54 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:23:54 AM	Tube furnace set to 950
1/11/2012	2:25:54 AM	Helium valve closed
1/11/2012	2:25:54 AM	BCl3 valve closed
1/11/2012	2:25:54 AM	PH3 valve closed
1/11/2012	2:25:54 AM	SiCl4 pre valve closed
1/11/2012	2:25:54 AM	SiCl4 post valve closed
1/11/2012	2:25:54 AM	Main Vac valve closed
1/11/2012	2:25:54 AM	Bypass valve closed
1/11/2012	2:25:54 AM	H2 valve opened
1/11/2012	2:25:54 AM	Bubbler valve opened
1/11/2012	2:25:54 AM	Helium MFC set to  0.000000
1/11/2012	2:25:54 AM	H2 MFC set to  500.000000
1/11/2012	2:25:54 AM	BCl3 MFC set to  0.000000
1/11/2012	2:25:54 AM	PH3 MFC set to  0.000000
1/11/2012	2:25:54 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:25:54 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:25:55 AM	Tube furnace set to 900
1/11/2012	2:27:55 AM	Helium valve closed
1/11/2012	2:27:55 AM	BCl3 valve closed
1/11/2012	2:27:55 AM	PH3 valve closed
1/11/2012	2:27:55 AM	SiCl4 pre valve closed
1/11/2012	2:27:55 AM	SiCl4 post valve closed
1/11/2012	2:27:55 AM	Main Vac valve closed
1/11/2012	2:27:55 AM	Bypass valve closed
1/11/2012	2:27:55 AM	H2 valve opened
1/11/2012	2:27:55 AM	Bubbler valve opened
1/11/2012	2:27:55 AM	Helium MFC set to  0.000000
1/11/2012	2:27:55 AM	H2 MFC set to  500.000000
1/11/2012	2:27:55 AM	BCl3 MFC set to  0.000000
1/11/2012	2:27:55 AM	PH3 MFC set to  0.000000
1/11/2012	2:27:55 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:27:55 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:27:55 AM	Tube furnace set to 850
1/11/2012	2:29:55 AM	H2 valve closed
1/11/2012	2:29:55 AM	BCl3 valve closed
1/11/2012	2:29:55 AM	PH3 valve closed
1/11/2012	2:29:55 AM	SiCl4 pre valve closed
1/11/2012	2:29:55 AM	SiCl4 post valve closed
1/11/2012	2:29:55 AM	Main Vac valve closed
1/11/2012	2:29:55 AM	Bypass valve closed
1/11/2012	2:29:55 AM	Helium valve opened
1/11/2012	2:29:55 AM	Bubbler valve opened
1/11/2012	2:29:55 AM	Helium MFC set to  500.000000
1/11/2012	2:29:55 AM	H2 MFC set to  0.000000
1/11/2012	2:29:55 AM	BCl3 MFC set to  0.000000
1/11/2012	2:29:55 AM	PH3 MFC set to  0.000000
1/11/2012	2:29:55 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:29:55 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:29:55 AM	Tube furnace set to 800
1/11/2012	2:31:55 AM	H2 valve closed
1/11/2012	2:31:55 AM	BCl3 valve closed
1/11/2012	2:31:55 AM	PH3 valve closed
1/11/2012	2:31:55 AM	SiCl4 pre valve closed
1/11/2012	2:31:55 AM	SiCl4 post valve closed
1/11/2012	2:31:55 AM	Main Vac valve closed
1/11/2012	2:31:55 AM	Bypass valve closed
1/11/2012	2:31:55 AM	Helium valve opened
1/11/2012	2:31:55 AM	Bubbler valve opened
1/11/2012	2:31:55 AM	Helium MFC set to  500.000000
1/11/2012	2:31:55 AM	H2 MFC set to  0.000000
1/11/2012	2:31:55 AM	BCl3 MFC set to  0.000000
1/11/2012	2:31:55 AM	PH3 MFC set to  0.000000
1/11/2012	2:31:55 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:31:55 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:31:55 AM	Tube furnace set to 750
1/11/2012	2:33:55 AM	H2 valve closed
1/11/2012	2:33:55 AM	BCl3 valve closed
1/11/2012	2:33:55 AM	PH3 valve closed
1/11/2012	2:33:55 AM	SiCl4 pre valve closed
1/11/2012	2:33:55 AM	SiCl4 post valve closed
1/11/2012	2:33:55 AM	Main Vac valve closed
1/11/2012	2:33:55 AM	Bypass valve closed
1/11/2012	2:33:55 AM	Helium valve opened
1/11/2012	2:33:55 AM	Bubbler valve opened
1/11/2012	2:33:55 AM	Helium MFC set to  500.000000
1/11/2012	2:33:55 AM	H2 MFC set to  0.000000
1/11/2012	2:33:55 AM	BCl3 MFC set to  0.000000
1/11/2012	2:33:55 AM	PH3 MFC set to  0.000000
1/11/2012	2:33:55 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:33:55 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:33:55 AM	Tube furnace set to 0
1/11/2012	2:53:55 AM	Helium valve closed
1/11/2012	2:53:55 AM	H2 valve closed
1/11/2012	2:53:55 AM	BCl3 valve closed
1/11/2012	2:53:55 AM	PH3 valve closed
1/11/2012	2:53:55 AM	SiCl4 pre valve closed
1/11/2012	2:53:55 AM	SiCl4 post valve closed
1/11/2012	2:53:55 AM	Main Vac valve closed
1/11/2012	2:53:55 AM	Bypass valve closed
1/11/2012	2:53:55 AM	Bubbler valve closed
1/11/2012	2:53:55 AM	Helium MFC set to  0.000000
1/11/2012	2:53:55 AM	H2 MFC set to  0.000000
1/11/2012	2:53:55 AM	BCl3 MFC set to  0.000000
1/11/2012	2:53:55 AM	PH3 MFC set to  0.000000
1/11/2012	2:53:55 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:53:55 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:53:56 AM	Tube furnace set to 0
1/11/2012	2:53:57 AM	Run finished at 2:53 AM
1/11/2012	2:55:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2012	2:55:12 AM	Recipe started at 2:55 AM
1/11/2012	2:55:12 AM	Helium valve closed
1/11/2012	2:55:12 AM	H2 valve closed
1/11/2012	2:55:12 AM	BCl3 valve closed
1/11/2012	2:55:12 AM	PH3 valve closed
1/11/2012	2:55:12 AM	SiCl4 pre valve closed
1/11/2012	2:55:12 AM	SiCl4 post valve closed
1/11/2012	2:55:12 AM	Main Vac valve closed
1/11/2012	2:55:12 AM	Bypass valve closed
1/11/2012	2:55:12 AM	Bubbler valve closed
1/11/2012	2:55:12 AM	Helium MFC set to  0.000000
1/11/2012	2:55:12 AM	H2 MFC set to  0.000000
1/11/2012	2:55:12 AM	BCl3 MFC set to  0.000000
1/11/2012	2:55:12 AM	PH3 MFC set to  0.000000
1/11/2012	2:55:12 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:55:12 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:55:12 AM	Tube furnace set to 0
1/11/2012	2:55:15 AM	H2 valve closed
1/11/2012	2:55:15 AM	BCl3 valve closed
1/11/2012	2:55:15 AM	PH3 valve closed
1/11/2012	2:55:15 AM	SiCl4 pre valve closed
1/11/2012	2:55:15 AM	SiCl4 post valve closed
1/11/2012	2:55:15 AM	Main Vac valve closed
1/11/2012	2:55:15 AM	Bypass valve closed
1/11/2012	2:55:15 AM	Bubbler valve closed
1/11/2012	2:55:15 AM	Helium valve opened
1/11/2012	2:55:15 AM	Helium MFC set to  500.000000
1/11/2012	2:55:15 AM	H2 MFC set to  0.000000
1/11/2012	2:55:15 AM	BCl3 MFC set to  0.000000
1/11/2012	2:55:15 AM	PH3 MFC set to  0.000000
1/11/2012	2:55:15 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:55:15 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:55:15 AM	Tube furnace set to 0
1/11/2012	2:55:15 AM	Helium valve closed
1/11/2012	2:55:15 AM	H2 valve closed
1/11/2012	2:55:15 AM	BCl3 valve closed
1/11/2012	2:55:15 AM	PH3 valve closed
1/11/2012	2:55:15 AM	SiCl4 pre valve closed
1/11/2012	2:55:15 AM	SiCl4 post valve closed
1/11/2012	2:55:15 AM	Main Vac valve closed
1/11/2012	2:55:15 AM	Bypass valve closed
1/11/2012	2:55:15 AM	Bubbler valve closed
1/11/2012	2:55:15 AM	Helium MFC set to  0.000000
1/11/2012	2:55:15 AM	H2 MFC set to  0.000000
1/11/2012	2:55:15 AM	BCl3 MFC set to  0.000000
1/11/2012	2:55:15 AM	PH3 MFC set to  0.000000
1/11/2012	2:55:15 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:55:15 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:55:16 AM	Tube furnace set to 0
1/11/2012	2:55:17 AM	Run finished at 2:55 AM
1/11/2012	2:55:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2012	2:58:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2012	2:58:57 AM	Recipe started at 2:58 AM
1/11/2012	2:58:58 AM	Helium valve closed
1/11/2012	2:58:58 AM	H2 valve closed
1/11/2012	2:58:58 AM	BCl3 valve closed
1/11/2012	2:58:58 AM	PH3 valve closed
1/11/2012	2:58:58 AM	SiCl4 pre valve closed
1/11/2012	2:58:58 AM	SiCl4 post valve closed
1/11/2012	2:58:58 AM	Main Vac valve closed
1/11/2012	2:58:58 AM	Bubbler valve closed
1/11/2012	2:58:58 AM	Bypass valve opened
1/11/2012	2:58:58 AM	Helium MFC set to  0.000000
1/11/2012	2:58:58 AM	H2 MFC set to  0.000000
1/11/2012	2:58:58 AM	BCl3 MFC set to  0.000000
1/11/2012	2:58:58 AM	PH3 MFC set to  0.000000
1/11/2012	2:58:58 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:58:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:58:58 AM	Tube furnace set to 0
1/11/2012	2:59:53 AM	Helium valve closed
1/11/2012	2:59:53 AM	H2 valve closed
1/11/2012	2:59:53 AM	BCl3 valve closed
1/11/2012	2:59:53 AM	PH3 valve closed
1/11/2012	2:59:53 AM	SiCl4 pre valve closed
1/11/2012	2:59:53 AM	SiCl4 post valve closed
1/11/2012	2:59:53 AM	Main Vac valve closed
1/11/2012	2:59:53 AM	Bubbler valve closed
1/11/2012	2:59:53 AM	Bypass valve opened
1/11/2012	2:59:53 AM	Helium MFC set to  0.000000
1/11/2012	2:59:53 AM	H2 MFC set to  0.000000
1/11/2012	2:59:53 AM	BCl3 MFC set to  0.000000
1/11/2012	2:59:53 AM	PH3 MFC set to  0.000000
1/11/2012	2:59:53 AM	SiCl4 MFC set to  0.000000
1/11/2012	2:59:53 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	2:59:53 AM	Tube furnace set to 0
1/11/2012	3:00:53 AM	Helium valve closed
1/11/2012	3:00:53 AM	H2 valve closed
1/11/2012	3:00:53 AM	BCl3 valve closed
1/11/2012	3:00:53 AM	PH3 valve closed
1/11/2012	3:00:53 AM	SiCl4 pre valve closed
1/11/2012	3:00:53 AM	SiCl4 post valve closed
1/11/2012	3:00:53 AM	Bypass valve closed
1/11/2012	3:00:53 AM	Bubbler valve closed
1/11/2012	3:00:53 AM	Main Vac valve opened
1/11/2012	3:00:53 AM	Helium MFC set to  0.000000
1/11/2012	3:00:53 AM	H2 MFC set to  0.000000
1/11/2012	3:00:53 AM	BCl3 MFC set to  0.000000
1/11/2012	3:00:53 AM	PH3 MFC set to  0.000000
1/11/2012	3:00:53 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:00:53 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:00:54 AM	Tube furnace set to 0
1/11/2012	3:00:55 AM	Run finished at 3:00 AM
1/11/2012	3:00:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2012	3:01:31 AM	Main Vac valve closed
1/11/2012	3:01:35 AM	Main Vac valve opened
1/11/2012	3:03:46 AM	Main Vac valve closed
1/11/2012	3:03:51 AM	Main Vac valve opened
1/11/2012	3:08:13 AM	Main Vac valve closed
1/11/2012	3:08:20 AM	Main Vac valve opened
1/11/2012	3:08:33 AM	Recipe started at 3:08 AM
1/11/2012	3:08:33 AM	Helium valve closed
1/11/2012	3:08:33 AM	H2 valve closed
1/11/2012	3:08:33 AM	BCl3 valve closed
1/11/2012	3:08:33 AM	PH3 valve closed
1/11/2012	3:08:33 AM	SiCl4 pre valve closed
1/11/2012	3:08:33 AM	SiCl4 post valve closed
1/11/2012	3:08:33 AM	Bypass valve closed
1/11/2012	3:08:33 AM	Bubbler valve closed
1/11/2012	3:08:33 AM	Main Vac valve opened
1/11/2012	3:08:33 AM	Helium MFC set to  0.000000
1/11/2012	3:08:33 AM	H2 MFC set to  0.000000
1/11/2012	3:08:33 AM	BCl3 MFC set to  0.000000
1/11/2012	3:08:33 AM	PH3 MFC set to  0.000000
1/11/2012	3:08:33 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:08:33 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:08:33 AM	Tube furnace set to 0
1/11/2012	3:09:03 AM	H2 valve closed
1/11/2012	3:09:03 AM	BCl3 valve closed
1/11/2012	3:09:03 AM	PH3 valve closed
1/11/2012	3:09:03 AM	SiCl4 pre valve closed
1/11/2012	3:09:03 AM	SiCl4 post valve closed
1/11/2012	3:09:03 AM	Bypass valve closed
1/11/2012	3:09:03 AM	Bubbler valve closed
1/11/2012	3:09:03 AM	Helium valve opened
1/11/2012	3:09:03 AM	Main Vac valve opened
1/11/2012	3:09:03 AM	Helium MFC set to  20.000000
1/11/2012	3:09:03 AM	H2 MFC set to  0.000000
1/11/2012	3:09:03 AM	BCl3 MFC set to  0.000000
1/11/2012	3:09:03 AM	PH3 MFC set to  0.000000
1/11/2012	3:09:03 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:09:03 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:09:03 AM	Tube furnace set to 0
1/11/2012	3:09:33 AM	Helium valve closed
1/11/2012	3:09:33 AM	H2 valve closed
1/11/2012	3:09:33 AM	BCl3 valve closed
1/11/2012	3:09:33 AM	PH3 valve closed
1/11/2012	3:09:33 AM	SiCl4 pre valve closed
1/11/2012	3:09:33 AM	SiCl4 post valve closed
1/11/2012	3:09:33 AM	Bypass valve closed
1/11/2012	3:09:33 AM	Bubbler valve closed
1/11/2012	3:09:33 AM	Main Vac valve opened
1/11/2012	3:09:33 AM	Helium MFC set to  0.000000
1/11/2012	3:09:33 AM	H2 MFC set to  0.000000
1/11/2012	3:09:33 AM	BCl3 MFC set to  0.000000
1/11/2012	3:09:33 AM	PH3 MFC set to  0.000000
1/11/2012	3:09:33 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:09:33 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:09:33 AM	Tube furnace set to 0
1/11/2012	3:10:03 AM	H2 valve closed
1/11/2012	3:10:03 AM	BCl3 valve closed
1/11/2012	3:10:03 AM	PH3 valve closed
1/11/2012	3:10:03 AM	SiCl4 pre valve closed
1/11/2012	3:10:03 AM	SiCl4 post valve closed
1/11/2012	3:10:03 AM	Bypass valve closed
1/11/2012	3:10:03 AM	Bubbler valve closed
1/11/2012	3:10:03 AM	Helium valve opened
1/11/2012	3:10:03 AM	Main Vac valve opened
1/11/2012	3:10:03 AM	Helium MFC set to  20.000000
1/11/2012	3:10:03 AM	H2 MFC set to  0.000000
1/11/2012	3:10:03 AM	BCl3 MFC set to  0.000000
1/11/2012	3:10:03 AM	PH3 MFC set to  0.000000
1/11/2012	3:10:03 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:10:03 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:10:03 AM	Tube furnace set to 0
1/11/2012	3:10:33 AM	Helium valve closed
1/11/2012	3:10:33 AM	H2 valve closed
1/11/2012	3:10:33 AM	BCl3 valve closed
1/11/2012	3:10:33 AM	PH3 valve closed
1/11/2012	3:10:33 AM	SiCl4 pre valve closed
1/11/2012	3:10:33 AM	SiCl4 post valve closed
1/11/2012	3:10:33 AM	Bypass valve closed
1/11/2012	3:10:33 AM	Bubbler valve closed
1/11/2012	3:10:33 AM	Main Vac valve opened
1/11/2012	3:10:33 AM	Helium MFC set to  0.000000
1/11/2012	3:10:33 AM	H2 MFC set to  0.000000
1/11/2012	3:10:33 AM	BCl3 MFC set to  0.000000
1/11/2012	3:10:33 AM	PH3 MFC set to  0.000000
1/11/2012	3:10:33 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:10:33 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:10:34 AM	Tube furnace set to 0
1/11/2012	3:11:04 AM	H2 valve closed
1/11/2012	3:11:04 AM	BCl3 valve closed
1/11/2012	3:11:04 AM	PH3 valve closed
1/11/2012	3:11:04 AM	SiCl4 pre valve closed
1/11/2012	3:11:04 AM	SiCl4 post valve closed
1/11/2012	3:11:04 AM	Bypass valve closed
1/11/2012	3:11:04 AM	Bubbler valve closed
1/11/2012	3:11:04 AM	Helium valve opened
1/11/2012	3:11:04 AM	Main Vac valve opened
1/11/2012	3:11:04 AM	Helium MFC set to  20.000000
1/11/2012	3:11:04 AM	H2 MFC set to  0.000000
1/11/2012	3:11:04 AM	BCl3 MFC set to  0.000000
1/11/2012	3:11:04 AM	PH3 MFC set to  0.000000
1/11/2012	3:11:04 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:11:04 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:11:04 AM	Tube furnace set to 0
1/11/2012	3:11:34 AM	Helium valve closed
1/11/2012	3:11:34 AM	H2 valve closed
1/11/2012	3:11:34 AM	BCl3 valve closed
1/11/2012	3:11:34 AM	PH3 valve closed
1/11/2012	3:11:34 AM	SiCl4 pre valve closed
1/11/2012	3:11:34 AM	SiCl4 post valve closed
1/11/2012	3:11:34 AM	Bypass valve closed
1/11/2012	3:11:34 AM	Bubbler valve closed
1/11/2012	3:11:34 AM	Main Vac valve opened
1/11/2012	3:11:34 AM	Helium MFC set to  0.000000
1/11/2012	3:11:34 AM	H2 MFC set to  0.000000
1/11/2012	3:11:34 AM	BCl3 MFC set to  0.000000
1/11/2012	3:11:34 AM	PH3 MFC set to  0.000000
1/11/2012	3:11:34 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:11:34 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:11:34 AM	Tube furnace set to 0
1/11/2012	3:12:04 AM	H2 valve closed
1/11/2012	3:12:04 AM	BCl3 valve closed
1/11/2012	3:12:04 AM	PH3 valve closed
1/11/2012	3:12:04 AM	SiCl4 pre valve closed
1/11/2012	3:12:04 AM	SiCl4 post valve closed
1/11/2012	3:12:04 AM	Bypass valve closed
1/11/2012	3:12:04 AM	Bubbler valve closed
1/11/2012	3:12:04 AM	Helium valve opened
1/11/2012	3:12:04 AM	Main Vac valve opened
1/11/2012	3:12:04 AM	Helium MFC set to  20.000000
1/11/2012	3:12:04 AM	H2 MFC set to  0.000000
1/11/2012	3:12:04 AM	BCl3 MFC set to  0.000000
1/11/2012	3:12:04 AM	PH3 MFC set to  0.000000
1/11/2012	3:12:04 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:12:04 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:12:04 AM	Tube furnace set to 0
1/11/2012	3:12:34 AM	Helium valve closed
1/11/2012	3:12:34 AM	H2 valve closed
1/11/2012	3:12:34 AM	BCl3 valve closed
1/11/2012	3:12:34 AM	PH3 valve closed
1/11/2012	3:12:34 AM	SiCl4 pre valve closed
1/11/2012	3:12:34 AM	SiCl4 post valve closed
1/11/2012	3:12:34 AM	Bypass valve closed
1/11/2012	3:12:34 AM	Bubbler valve closed
1/11/2012	3:12:34 AM	Main Vac valve opened
1/11/2012	3:12:34 AM	Helium MFC set to  0.000000
1/11/2012	3:12:34 AM	H2 MFC set to  0.000000
1/11/2012	3:12:34 AM	BCl3 MFC set to  0.000000
1/11/2012	3:12:34 AM	PH3 MFC set to  0.000000
1/11/2012	3:12:34 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:12:34 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:12:34 AM	Tube furnace set to 0
1/11/2012	3:13:04 AM	H2 valve closed
1/11/2012	3:13:04 AM	BCl3 valve closed
1/11/2012	3:13:04 AM	PH3 valve closed
1/11/2012	3:13:04 AM	SiCl4 pre valve closed
1/11/2012	3:13:04 AM	SiCl4 post valve closed
1/11/2012	3:13:04 AM	Bypass valve closed
1/11/2012	3:13:04 AM	Bubbler valve closed
1/11/2012	3:13:04 AM	Helium valve opened
1/11/2012	3:13:04 AM	Main Vac valve opened
1/11/2012	3:13:04 AM	Helium MFC set to  20.000000
1/11/2012	3:13:04 AM	H2 MFC set to  0.000000
1/11/2012	3:13:04 AM	BCl3 MFC set to  0.000000
1/11/2012	3:13:04 AM	PH3 MFC set to  0.000000
1/11/2012	3:13:04 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:13:04 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:13:05 AM	Tube furnace set to 0
1/11/2012	3:13:35 AM	Helium valve closed
1/11/2012	3:13:35 AM	H2 valve closed
1/11/2012	3:13:35 AM	BCl3 valve closed
1/11/2012	3:13:35 AM	PH3 valve closed
1/11/2012	3:13:35 AM	SiCl4 pre valve closed
1/11/2012	3:13:35 AM	SiCl4 post valve closed
1/11/2012	3:13:35 AM	Bypass valve closed
1/11/2012	3:13:35 AM	Bubbler valve closed
1/11/2012	3:13:35 AM	Main Vac valve opened
1/11/2012	3:13:35 AM	Helium MFC set to  0.000000
1/11/2012	3:13:35 AM	H2 MFC set to  0.000000
1/11/2012	3:13:35 AM	BCl3 MFC set to  0.000000
1/11/2012	3:13:35 AM	PH3 MFC set to  0.000000
1/11/2012	3:13:35 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:13:35 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:13:35 AM	Tube furnace set to 0
1/11/2012	3:14:05 AM	H2 valve closed
1/11/2012	3:14:05 AM	BCl3 valve closed
1/11/2012	3:14:05 AM	PH3 valve closed
1/11/2012	3:14:05 AM	SiCl4 pre valve closed
1/11/2012	3:14:05 AM	SiCl4 post valve closed
1/11/2012	3:14:05 AM	Bypass valve closed
1/11/2012	3:14:05 AM	Bubbler valve closed
1/11/2012	3:14:05 AM	Helium valve opened
1/11/2012	3:14:05 AM	Main Vac valve opened
1/11/2012	3:14:05 AM	Helium MFC set to  20.000000
1/11/2012	3:14:05 AM	H2 MFC set to  0.000000
1/11/2012	3:14:05 AM	BCl3 MFC set to  0.000000
1/11/2012	3:14:05 AM	PH3 MFC set to  0.000000
1/11/2012	3:14:05 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:14:05 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:14:05 AM	Tube furnace set to 0
1/11/2012	3:14:35 AM	Helium valve closed
1/11/2012	3:14:35 AM	H2 valve closed
1/11/2012	3:14:35 AM	BCl3 valve closed
1/11/2012	3:14:35 AM	PH3 valve closed
1/11/2012	3:14:35 AM	SiCl4 pre valve closed
1/11/2012	3:14:35 AM	SiCl4 post valve closed
1/11/2012	3:14:35 AM	Bypass valve closed
1/11/2012	3:14:35 AM	Bubbler valve closed
1/11/2012	3:14:35 AM	Main Vac valve opened
1/11/2012	3:14:35 AM	Helium MFC set to  0.000000
1/11/2012	3:14:35 AM	H2 MFC set to  0.000000
1/11/2012	3:14:35 AM	BCl3 MFC set to  0.000000
1/11/2012	3:14:35 AM	PH3 MFC set to  0.000000
1/11/2012	3:14:35 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:14:35 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:14:35 AM	Tube furnace set to 0
1/11/2012	3:15:05 AM	H2 valve closed
1/11/2012	3:15:05 AM	BCl3 valve closed
1/11/2012	3:15:05 AM	PH3 valve closed
1/11/2012	3:15:05 AM	SiCl4 pre valve closed
1/11/2012	3:15:05 AM	SiCl4 post valve closed
1/11/2012	3:15:05 AM	Bypass valve closed
1/11/2012	3:15:05 AM	Bubbler valve closed
1/11/2012	3:15:05 AM	Helium valve opened
1/11/2012	3:15:05 AM	Main Vac valve opened
1/11/2012	3:15:05 AM	Helium MFC set to  20.000000
1/11/2012	3:15:05 AM	H2 MFC set to  0.000000
1/11/2012	3:15:05 AM	BCl3 MFC set to  0.000000
1/11/2012	3:15:05 AM	PH3 MFC set to  0.000000
1/11/2012	3:15:05 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:15:05 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:15:05 AM	Tube furnace set to 0
1/11/2012	3:15:36 AM	Helium valve closed
1/11/2012	3:15:36 AM	H2 valve closed
1/11/2012	3:15:36 AM	BCl3 valve closed
1/11/2012	3:15:36 AM	PH3 valve closed
1/11/2012	3:15:36 AM	SiCl4 pre valve closed
1/11/2012	3:15:36 AM	SiCl4 post valve closed
1/11/2012	3:15:36 AM	Bypass valve closed
1/11/2012	3:15:36 AM	Bubbler valve closed
1/11/2012	3:15:36 AM	Main Vac valve opened
1/11/2012	3:15:36 AM	Helium MFC set to  0.000000
1/11/2012	3:15:36 AM	H2 MFC set to  0.000000
1/11/2012	3:15:36 AM	BCl3 MFC set to  0.000000
1/11/2012	3:15:36 AM	PH3 MFC set to  0.000000
1/11/2012	3:15:36 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:15:36 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:15:36 AM	Tube furnace set to 0
1/11/2012	3:16:06 AM	H2 valve closed
1/11/2012	3:16:06 AM	BCl3 valve closed
1/11/2012	3:16:06 AM	PH3 valve closed
1/11/2012	3:16:06 AM	SiCl4 pre valve closed
1/11/2012	3:16:06 AM	SiCl4 post valve closed
1/11/2012	3:16:06 AM	Bypass valve closed
1/11/2012	3:16:06 AM	Bubbler valve closed
1/11/2012	3:16:06 AM	Helium valve opened
1/11/2012	3:16:06 AM	Main Vac valve opened
1/11/2012	3:16:06 AM	Helium MFC set to  20.000000
1/11/2012	3:16:06 AM	H2 MFC set to  0.000000
1/11/2012	3:16:06 AM	BCl3 MFC set to  0.000000
1/11/2012	3:16:06 AM	PH3 MFC set to  0.000000
1/11/2012	3:16:06 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:16:06 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:16:06 AM	Tube furnace set to 0
1/11/2012	3:16:36 AM	Helium valve closed
1/11/2012	3:16:36 AM	H2 valve closed
1/11/2012	3:16:36 AM	BCl3 valve closed
1/11/2012	3:16:36 AM	PH3 valve closed
1/11/2012	3:16:36 AM	SiCl4 pre valve closed
1/11/2012	3:16:36 AM	SiCl4 post valve closed
1/11/2012	3:16:36 AM	Bypass valve closed
1/11/2012	3:16:36 AM	Bubbler valve closed
1/11/2012	3:16:36 AM	Main Vac valve opened
1/11/2012	3:16:36 AM	Helium MFC set to  0.000000
1/11/2012	3:16:36 AM	H2 MFC set to  0.000000
1/11/2012	3:16:36 AM	BCl3 MFC set to  0.000000
1/11/2012	3:16:36 AM	PH3 MFC set to  0.000000
1/11/2012	3:16:36 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:16:36 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:16:36 AM	Tube furnace set to 0
1/11/2012	3:17:06 AM	H2 valve closed
1/11/2012	3:17:06 AM	BCl3 valve closed
1/11/2012	3:17:06 AM	PH3 valve closed
1/11/2012	3:17:06 AM	SiCl4 pre valve closed
1/11/2012	3:17:06 AM	SiCl4 post valve closed
1/11/2012	3:17:06 AM	Bypass valve closed
1/11/2012	3:17:06 AM	Bubbler valve closed
1/11/2012	3:17:06 AM	Helium valve opened
1/11/2012	3:17:06 AM	Main Vac valve opened
1/11/2012	3:17:06 AM	Helium MFC set to  20.000000
1/11/2012	3:17:06 AM	H2 MFC set to  0.000000
1/11/2012	3:17:06 AM	BCl3 MFC set to  0.000000
1/11/2012	3:17:06 AM	PH3 MFC set to  0.000000
1/11/2012	3:17:06 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:17:06 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:17:06 AM	Tube furnace set to 0
1/11/2012	3:17:36 AM	Helium valve closed
1/11/2012	3:17:36 AM	H2 valve closed
1/11/2012	3:17:36 AM	BCl3 valve closed
1/11/2012	3:17:36 AM	PH3 valve closed
1/11/2012	3:17:36 AM	SiCl4 pre valve closed
1/11/2012	3:17:36 AM	SiCl4 post valve closed
1/11/2012	3:17:36 AM	Bypass valve closed
1/11/2012	3:17:36 AM	Bubbler valve closed
1/11/2012	3:17:36 AM	Main Vac valve opened
1/11/2012	3:17:36 AM	Helium MFC set to  0.000000
1/11/2012	3:17:36 AM	H2 MFC set to  0.000000
1/11/2012	3:17:36 AM	BCl3 MFC set to  0.000000
1/11/2012	3:17:36 AM	PH3 MFC set to  0.000000
1/11/2012	3:17:36 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:17:36 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:17:37 AM	Tube furnace set to 200
1/11/2012	3:18:07 AM	H2 valve closed
1/11/2012	3:18:07 AM	BCl3 valve closed
1/11/2012	3:18:07 AM	PH3 valve closed
1/11/2012	3:18:07 AM	SiCl4 pre valve closed
1/11/2012	3:18:07 AM	SiCl4 post valve closed
1/11/2012	3:18:07 AM	Bypass valve closed
1/11/2012	3:18:07 AM	Bubbler valve closed
1/11/2012	3:18:07 AM	Helium valve opened
1/11/2012	3:18:07 AM	Main Vac valve opened
1/11/2012	3:18:07 AM	Helium MFC set to  20.000000
1/11/2012	3:18:07 AM	H2 MFC set to  0.000000
1/11/2012	3:18:07 AM	BCl3 MFC set to  0.000000
1/11/2012	3:18:07 AM	PH3 MFC set to  0.000000
1/11/2012	3:18:07 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:18:07 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:18:07 AM	Tube furnace set to 200
1/11/2012	3:18:37 AM	Helium valve closed
1/11/2012	3:18:37 AM	H2 valve closed
1/11/2012	3:18:37 AM	BCl3 valve closed
1/11/2012	3:18:37 AM	PH3 valve closed
1/11/2012	3:18:37 AM	SiCl4 pre valve closed
1/11/2012	3:18:37 AM	SiCl4 post valve closed
1/11/2012	3:18:37 AM	Bypass valve closed
1/11/2012	3:18:37 AM	Bubbler valve closed
1/11/2012	3:18:37 AM	Main Vac valve opened
1/11/2012	3:18:37 AM	Helium MFC set to  0.000000
1/11/2012	3:18:37 AM	H2 MFC set to  0.000000
1/11/2012	3:18:37 AM	BCl3 MFC set to  0.000000
1/11/2012	3:18:37 AM	PH3 MFC set to  0.000000
1/11/2012	3:18:37 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:18:37 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:18:37 AM	Tube furnace set to 200
1/11/2012	3:19:07 AM	H2 valve closed
1/11/2012	3:19:07 AM	BCl3 valve closed
1/11/2012	3:19:07 AM	PH3 valve closed
1/11/2012	3:19:07 AM	SiCl4 pre valve closed
1/11/2012	3:19:07 AM	SiCl4 post valve closed
1/11/2012	3:19:07 AM	Bypass valve closed
1/11/2012	3:19:07 AM	Bubbler valve closed
1/11/2012	3:19:07 AM	Helium valve opened
1/11/2012	3:19:07 AM	Main Vac valve opened
1/11/2012	3:19:07 AM	Helium MFC set to  20.000000
1/11/2012	3:19:07 AM	H2 MFC set to  0.000000
1/11/2012	3:19:07 AM	BCl3 MFC set to  0.000000
1/11/2012	3:19:07 AM	PH3 MFC set to  0.000000
1/11/2012	3:19:07 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:19:07 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:19:07 AM	Tube furnace set to 200
1/11/2012	3:19:37 AM	Helium valve closed
1/11/2012	3:19:37 AM	H2 valve closed
1/11/2012	3:19:37 AM	BCl3 valve closed
1/11/2012	3:19:37 AM	PH3 valve closed
1/11/2012	3:19:37 AM	SiCl4 pre valve closed
1/11/2012	3:19:37 AM	SiCl4 post valve closed
1/11/2012	3:19:37 AM	Bypass valve closed
1/11/2012	3:19:37 AM	Bubbler valve closed
1/11/2012	3:19:37 AM	Main Vac valve opened
1/11/2012	3:19:37 AM	Helium MFC set to  0.000000
1/11/2012	3:19:37 AM	H2 MFC set to  0.000000
1/11/2012	3:19:37 AM	BCl3 MFC set to  0.000000
1/11/2012	3:19:37 AM	PH3 MFC set to  0.000000
1/11/2012	3:19:37 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:19:37 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:19:37 AM	Tube furnace set to 200
1/11/2012	3:20:07 AM	H2 valve closed
1/11/2012	3:20:07 AM	BCl3 valve closed
1/11/2012	3:20:07 AM	PH3 valve closed
1/11/2012	3:20:07 AM	SiCl4 pre valve closed
1/11/2012	3:20:07 AM	SiCl4 post valve closed
1/11/2012	3:20:07 AM	Bypass valve closed
1/11/2012	3:20:07 AM	Bubbler valve closed
1/11/2012	3:20:07 AM	Helium valve opened
1/11/2012	3:20:07 AM	Main Vac valve opened
1/11/2012	3:20:07 AM	Helium MFC set to  20.000000
1/11/2012	3:20:07 AM	H2 MFC set to  0.000000
1/11/2012	3:20:07 AM	BCl3 MFC set to  0.000000
1/11/2012	3:20:07 AM	PH3 MFC set to  0.000000
1/11/2012	3:20:07 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:20:07 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:20:08 AM	Tube furnace set to 200
1/11/2012	3:20:38 AM	Helium valve closed
1/11/2012	3:20:38 AM	H2 valve closed
1/11/2012	3:20:38 AM	BCl3 valve closed
1/11/2012	3:20:38 AM	PH3 valve closed
1/11/2012	3:20:38 AM	SiCl4 pre valve closed
1/11/2012	3:20:38 AM	SiCl4 post valve closed
1/11/2012	3:20:38 AM	Bypass valve closed
1/11/2012	3:20:38 AM	Bubbler valve closed
1/11/2012	3:20:38 AM	Main Vac valve opened
1/11/2012	3:20:38 AM	Helium MFC set to  0.000000
1/11/2012	3:20:38 AM	H2 MFC set to  0.000000
1/11/2012	3:20:38 AM	BCl3 MFC set to  0.000000
1/11/2012	3:20:38 AM	PH3 MFC set to  0.000000
1/11/2012	3:20:38 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:20:38 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:20:38 AM	Tube furnace set to 200
1/11/2012	3:21:08 AM	H2 valve closed
1/11/2012	3:21:08 AM	BCl3 valve closed
1/11/2012	3:21:08 AM	PH3 valve closed
1/11/2012	3:21:08 AM	SiCl4 pre valve closed
1/11/2012	3:21:08 AM	SiCl4 post valve closed
1/11/2012	3:21:08 AM	Bypass valve closed
1/11/2012	3:21:08 AM	Bubbler valve closed
1/11/2012	3:21:08 AM	Helium valve opened
1/11/2012	3:21:08 AM	Main Vac valve opened
1/11/2012	3:21:08 AM	Helium MFC set to  20.000000
1/11/2012	3:21:08 AM	H2 MFC set to  0.000000
1/11/2012	3:21:08 AM	BCl3 MFC set to  0.000000
1/11/2012	3:21:08 AM	PH3 MFC set to  0.000000
1/11/2012	3:21:08 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:21:08 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:21:08 AM	Tube furnace set to 200
1/11/2012	3:21:38 AM	Helium valve closed
1/11/2012	3:21:38 AM	H2 valve closed
1/11/2012	3:21:38 AM	BCl3 valve closed
1/11/2012	3:21:38 AM	PH3 valve closed
1/11/2012	3:21:38 AM	SiCl4 pre valve closed
1/11/2012	3:21:38 AM	SiCl4 post valve closed
1/11/2012	3:21:38 AM	Bypass valve closed
1/11/2012	3:21:38 AM	Bubbler valve closed
1/11/2012	3:21:38 AM	Main Vac valve opened
1/11/2012	3:21:38 AM	Helium MFC set to  0.000000
1/11/2012	3:21:38 AM	H2 MFC set to  0.000000
1/11/2012	3:21:38 AM	BCl3 MFC set to  0.000000
1/11/2012	3:21:38 AM	PH3 MFC set to  0.000000
1/11/2012	3:21:38 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:21:38 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:21:38 AM	Tube furnace set to 200
1/11/2012	3:22:08 AM	H2 valve closed
1/11/2012	3:22:08 AM	BCl3 valve closed
1/11/2012	3:22:08 AM	PH3 valve closed
1/11/2012	3:22:08 AM	SiCl4 pre valve closed
1/11/2012	3:22:08 AM	SiCl4 post valve closed
1/11/2012	3:22:08 AM	Bypass valve closed
1/11/2012	3:22:08 AM	Bubbler valve closed
1/11/2012	3:22:08 AM	Helium valve opened
1/11/2012	3:22:08 AM	Main Vac valve opened
1/11/2012	3:22:08 AM	Helium MFC set to  20.000000
1/11/2012	3:22:08 AM	H2 MFC set to  0.000000
1/11/2012	3:22:08 AM	BCl3 MFC set to  0.000000
1/11/2012	3:22:08 AM	PH3 MFC set to  0.000000
1/11/2012	3:22:08 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:22:08 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:22:08 AM	Tube furnace set to 200
1/11/2012	3:22:39 AM	Helium valve closed
1/11/2012	3:22:39 AM	H2 valve closed
1/11/2012	3:22:39 AM	BCl3 valve closed
1/11/2012	3:22:39 AM	PH3 valve closed
1/11/2012	3:22:39 AM	SiCl4 pre valve closed
1/11/2012	3:22:39 AM	SiCl4 post valve closed
1/11/2012	3:22:39 AM	Bypass valve closed
1/11/2012	3:22:39 AM	Bubbler valve closed
1/11/2012	3:22:39 AM	Main Vac valve opened
1/11/2012	3:22:39 AM	Helium MFC set to  0.000000
1/11/2012	3:22:39 AM	H2 MFC set to  0.000000
1/11/2012	3:22:39 AM	BCl3 MFC set to  0.000000
1/11/2012	3:22:39 AM	PH3 MFC set to  0.000000
1/11/2012	3:22:39 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:22:39 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:22:39 AM	Tube furnace set to 200
1/11/2012	3:23:09 AM	H2 valve closed
1/11/2012	3:23:09 AM	BCl3 valve closed
1/11/2012	3:23:09 AM	PH3 valve closed
1/11/2012	3:23:09 AM	SiCl4 pre valve closed
1/11/2012	3:23:09 AM	SiCl4 post valve closed
1/11/2012	3:23:09 AM	Bypass valve closed
1/11/2012	3:23:09 AM	Bubbler valve closed
1/11/2012	3:23:09 AM	Helium valve opened
1/11/2012	3:23:09 AM	Main Vac valve opened
1/11/2012	3:23:09 AM	Helium MFC set to  20.000000
1/11/2012	3:23:09 AM	H2 MFC set to  0.000000
1/11/2012	3:23:09 AM	BCl3 MFC set to  0.000000
1/11/2012	3:23:09 AM	PH3 MFC set to  0.000000
1/11/2012	3:23:09 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:23:09 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:23:09 AM	Tube furnace set to 200
1/11/2012	3:23:39 AM	Helium valve closed
1/11/2012	3:23:39 AM	H2 valve closed
1/11/2012	3:23:39 AM	BCl3 valve closed
1/11/2012	3:23:39 AM	PH3 valve closed
1/11/2012	3:23:39 AM	SiCl4 pre valve closed
1/11/2012	3:23:39 AM	SiCl4 post valve closed
1/11/2012	3:23:39 AM	Bypass valve closed
1/11/2012	3:23:39 AM	Bubbler valve closed
1/11/2012	3:23:39 AM	Main Vac valve opened
1/11/2012	3:23:39 AM	Helium MFC set to  0.000000
1/11/2012	3:23:39 AM	H2 MFC set to  0.000000
1/11/2012	3:23:39 AM	BCl3 MFC set to  0.000000
1/11/2012	3:23:39 AM	PH3 MFC set to  0.000000
1/11/2012	3:23:39 AM	SiCl4 MFC set to  0.000000
1/11/2012	3:23:39 AM	Bypass solenoid MFC set to  0.000000
1/11/2012	3:23:39 AM	Tube furnace set to 0
1/11/2012	3:23:40 AM	Run finished at 3:23 AM
1/11/2012	3:53:23 AM	Main Vac valve closed
1/11/2012	3:53:31 AM	Main Vac valve opened
1/11/2012	11:47:24 AM	Helium valve closed
1/11/2012	11:47:24 AM	H2 valve closed
1/11/2012	11:47:24 AM	BCl3 valve closed
1/11/2012	11:47:24 AM	PH3 valve closed
1/11/2012	11:47:24 AM	SiCl4 pre valve closed
1/11/2012	11:47:24 AM	SiCl4 post valve closed
1/11/2012	11:47:24 AM	Main Vac valve closed
1/11/2012	11:47:24 AM	Bypass valve closed
1/11/2012	11:47:24 AM	Bubbler valve closed
1/11/2012	11:47:24 AM	Helium MFC set to  0.000000
1/11/2012	11:47:24 AM	H2 MFC set to  0.000000
1/11/2012	11:47:24 AM	BCl3 MFC set to  0.000000
1/11/2012	11:47:24 AM	PH3 MFC set to  0.000000
1/11/2012	11:47:24 AM	SiCl4 MFC set to  0.000000
1/11/2012	11:47:24 AM	Bypass solenoid MFC set to  760.000000
1/11/2012	11:47:24 AM	Tube furnace set to 0
1/11/2012	11:47:30 AM	Helium valve closed
1/11/2012	11:47:30 AM	H2 valve closed
1/11/2012	11:47:30 AM	BCl3 valve closed
1/11/2012	11:47:30 AM	PH3 valve closed
1/11/2012	11:47:30 AM	SiCl4 pre valve closed
1/11/2012	11:47:30 AM	SiCl4 post valve closed
1/11/2012	11:47:30 AM	Main Vac valve closed
1/11/2012	11:47:30 AM	Bypass valve closed
1/11/2012	11:47:30 AM	Bubbler valve closed
1/11/2012	11:47:30 AM	Helium MFC set to  0.000000
1/11/2012	11:47:30 AM	H2 MFC set to  0.000000
1/11/2012	11:47:30 AM	BCl3 MFC set to  0.000000
1/11/2012	11:47:30 AM	PH3 MFC set to  0.000000
1/11/2012	11:47:30 AM	SiCl4 MFC set to  0.000000
1/11/2012	11:47:30 AM	Bypass solenoid MFC set to  760.000000
1/11/2012	11:47:30 AM	Tube furnace set to 0
1/11/2012	11:47:31 AM	Main Vac valve opened
